High voltage P type SOI MOS transistor
A technology of silicon-on-insulator and semiconductor tube, which is applied in the field of power semiconductor devices, can solve the problems of reducing bonding strength, manufacturing process complexity, unfavorable device heat dissipation, etc. effect of current
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[0019] refer to figure 2 , a high-voltage P-type silicon-on-insulator metal oxide semiconductor tube, comprising: a semiconductor substrate 9, a buried oxide layer 8 is arranged on the semiconductor substrate 9, an N well 6 and a P-type well are arranged on the buried oxide layer 8 The doped semiconductor region 7 is provided with a P-type drain region 10 on the P-type doped semiconductor region 7, a P-type source region 12 and an N-type contact region 11 are provided on the N well 6, and a P-type drain region 10 is provided on the surface of the N well 6. The gate oxide layer 3 and the gate oxide layer 3 extend from the N well 6 to the P-type doped semiconductor region 7. On the surface of the N well 6, the P-type source region 12, the N-type contact region 11 and the area other than the gate oxide layer 3 and the P The area other than the P-type drain region 10 on the surface of the P-type doped semiconductor region 7 is provided with a field oxide layer 1, and a polysilico...
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