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Plasma treatment method for corrosion-proof turbine molecular pump blade

A turbomolecular pump and plasma technology, which is applied to the components, pumps, and pump components of the pumping device for elastic fluids, can solve the problems of affecting the mechanical strength of aluminum alloy blades, being easily corroded, damaged, etc. The effect of clean and environmentally friendly process, strong corrosion resistance and simple treatment process

Inactive Publication Date: 2009-08-05
SUZHOU SUNLIGHTS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] When working, the impeller rotor needs to rotate at high speed, so its material is generally made of high-strength lightweight aluminum alloy. In many practical applications, turbomolecular pumps need to pump corrosive gases, and the impeller blades of aluminum alloy are Corrosive gas is easily damaged by corrosion
[0004] In order to improve the corrosion resistance of the blades, the aluminum alloy blades are usually anodized, as described in patents 89105774.9 and 92101878.9, and the surface of the blades is treated to form a corrosion-resistant layer of aluminum oxide. However, anodic oxidation is generally used to form The aluminum oxide film is porous and not dense enough, and it is easy to outgas when the molecular pump is working, which affects the vacuum degree, and the corrosion resistance of this type of aluminum oxide film is low and the life is short; if the thickness of the aluminum oxide film is thickened, It will affect the mechanical strength of aluminum alloy blades; in addition, the use of anodic oxidation process is easy to cause environmental pollution

Method used

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  • Plasma treatment method for corrosion-proof turbine molecular pump blade
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Using CCP plasma processing device, put the blade of the molecular pump into figure 1 In the vacuum chamber 1 shown, after the background vacuum in the vacuum chamber is evacuated to less than 1 Pa, 99.99% high-purity Ar is introduced at 100 sccm, and the pressure is maintained at 10 Pa, and the electromagnetic coil 2 outside the vacuum chamber 1 is added Electric current, the electromagnetic field generated is kept at 100 Gauss, and 800W of radio frequency power is applied to the blade 3 through the electrode 4 for 5 minutes, so that the surface of the blade is cleaned;

[0024] Then oxygen gas is introduced into the vacuum chamber 1, the flow of argon is adjusted to 10sccm, the flow of oxygen is 50sccm, the air pressure in the vacuum chamber is maintained at 50Pa, the RF power is 400W, the blade temperature is controlled at 400℃, after treatment for 3 hours, natural cooling Take it out to room temperature, so that about 30μm of aluminum oxide will be formed on the surfac...

Embodiment 2

[0026] Using CCP plasma processing device, put the blade of the molecular pump into figure 1 In the vacuum chamber 1 shown, after the background vacuum in the vacuum chamber is pumped to less than 1 Pa, 99.99% high-purity Ar is introduced at 100 sccm, the pressure is maintained at 10 Pa, and the electromagnetic coil 2 outside the vacuum chamber 1 is applied with current. To keep the generated electromagnetic field at 200 Gauss, add 800W of RF power to the blade 3 through the electrode 4 for 5 minutes to clean the surface of the blade;

[0027] Then pass nitrogen into the vacuum chamber 1, adjust the flow of argon to 10sccm, the flow of nitrogen to 100sccm, keep the air pressure at 30Pa, the RF power at 500W, and the blade temperature at 400℃. After treatment for 2 hours, cool to room temperature and take it out. In this way, aluminum nitride with a thickness of about 20μm will be formed on the surface of the aluminum alloy blade, which can play a role in corrosion resistance.

Embodiment 3

[0029] Using ICP plasma processing device, put the blade of the molecular pump into figure 2 In the vacuum chamber 1 shown, after the background vacuum of the vacuum chamber is evacuated to less than 1 Pa, 99.99% high-purity Ar is introduced at 50 sccm, the pressure is controlled at 5 Pa, and the coil 22 is placed outside the quartz window 21 through the radio frequency power supply. Apply 500W of radio frequency power, apply a negative bias voltage of 200V to the blade 3 through the electrode 4, and keep it for 5 minutes, so that the surface of the blade is cleaned;

[0030] Then pass oxygen at 50sccm into the vacuum chamber, the oxygen flow is 50sccm, the argon flow is adjusted to 5sccm, the air pressure is maintained at 5Pa, the RF power is adjusted to 400W, the blade temperature is controlled at 300℃, the negative bias voltage is 50V, and the treatment is 2 hours After that, it is naturally cooled to room temperature and taken out. In this way, aluminum oxide with a thickness ...

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Abstract

The invention relates to the technical field of vane surface treatment of a turbo molecular pump, in particular to a plasma treatment method of a corrosion-resistant turbo molecular pump vane. The method comprises the following step that firstly, a plasma is cleaned: the vane is put into a vacuum chamber of a plasma treatment device, the vacuum chamber is vacuumized, and the plasma is cleaned by injecting Ar and adding radio frequency; secondly, the plasma is oxidized or nitridized: O2, N2 or NH3 is injected into the vacuum chamber with atmospheric pressure of 1Pa-1KPa and treated for 1-5 hours with the radio frequency power of 100-5000W, the temperature of 200-400 DEG C and the power density of 1-60W / cm. Compared with the prior art, the invention has simple and environmental-friendly surface processing technology, and an oxidation layer or a nitration layer formed on the surface of the aluminum alloy vane treated by the process has high compactness and strong corrosion resisting capacity.

Description

[Technical Field] [0001] The invention relates to the technical field of surface treatment of turbomolecular pump blades, in particular to a plasma treatment method for corrosion-resistant turbomolecular pump blades. [Background technique] [0002] The turbo molecular pump is a clean and efficient vacuum obtaining device. Its working principle is that a high-speed rotating impeller rotor and a stationary static impeller move relative to each other, while carrying and transporting gas molecules out of the equipment cavity along a given passage of the static impeller. , Get the required vacuum environment. [0003] When working, the impeller rotor needs to rotate at a high speed, so its material is generally high-strength lightweight aluminum alloy material. In many practical applications, turbomolecular pumps need to pump corrosive gases, and aluminum alloy impeller blades are pumping When corrosive gas is easy to be corroded and damaged. [0004] In order to improve the corrosion...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C8/36F04D19/04F04D29/38
CPCF04D29/023
Inventor 孙卓张哲娟孙鹏刘素霞
Owner SUZHOU SUNLIGHTS TECH
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