Plasma treatment method for corrosion-proof turbine molecular pump blade

A turbomolecular pump and plasma technology, which is applied to the components, pumps, and pump components of the pumping device for elastic fluids, can solve the problems of affecting the mechanical strength of aluminum alloy blades, being easily corroded, damaged, etc. The effect of clean and environmentally friendly process, strong corrosion resistance and simple treatment process
CN101497982AInactive Publication Date: 2009-08-05SUZHOU SUNLIGHTS TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SUZHOU SUNLIGHTS TECH
Publication Date
2009-08-05
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to the technical field of vane surface treatment of a turbo molecular pump, in particular to a plasma treatment method of a corrosion-resistant turbo molecular pump vane. The method comprises the following step that firstly, a plasma is cleaned: the vane is put into a vacuum chamber of a plasma treatment device, the vacuum chamber is vacuumized, and the plasma is cleaned by injecting Ar and adding radio frequency; secondly, the plasma is oxidized or nitridized: O2, N2 or NH3 is injected into the vacuum chamber with atmospheric pressure of 1Pa-1KPa and treated for 1-5 hours with the radio frequency power of 100-5000W, the temperature of 200-400 DEG C and the power density of 1-60W / cm. Compared with the prior art, the invention has simple and environmental-friendly surface processing technology, and an oxidation layer or a nitration layer formed on the surface of the aluminum alloy vane treated by the process has high compactness and strong corrosion resisting capacity.
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Description

[Technical Field]

[0001] The invention relates to the technical field of surface treatment of turbomolecular pump blades, in particular to a plasma treatment method for corrosion-resistant turbomolecular pump blades. [Background technique]

[0002] The turbo molecular pump is a clean and efficient vacuum obtaining device. Its working principle is that a high-speed rotating impeller rotor and a stationary static impeller move relative to each other, while carrying and transporting gas molecules out of the equipment cavity along a given passage of the static impeller. , Get the required vacuum environment.

[0003] When working, the impeller rotor needs to rotate at a high speed, so its material is generally high-strength lightweight aluminum alloy material. In many practical applications, turbomolecular pumps need to pump corrosive gases, and aluminum alloy impeller blades are pumping When corrosive gas is easy to be corroded and damaged.

[0004] In order to improve the corrosion...

Claims

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