Micro super capacitor applied for micro system and production process thereof

Abstract

The invention discloses a micro supercapacitor applied to a micro system and a preparation method thereof, which belong to the manufacturing technology range of miniature supercapacitors. The preparation method comprises the following steps: drawing graphs of a micro capacitor and an array thereof on a silicon substrate through a mask and a photoetching method; preparing a layer of a metal film current collector and a layer of a ruthenium-oxide film cathode layer on the silicon substrate; spin-coating a layer of a polyimide sacrifice layer on the layers to obtain a required support body structure and a peripheral liquid storage cavity enclosure structure; spin-coating the sacrifice layer on the layers again and depositing an anode ruthenium-oxide active substance layer and a nickel film current collector layers in turn on the layers; perforating filling holes on the upper nickel layer and an oxide layer to fill an electrolyte in a cavity; and finally, covering a polymer film layer on the whole micro supercapacitor array again to finish an encapsulation process. The micro supercapacitor is provided with the unique support body structure and the liquid storage cavity structure, has the characteristics of small volume, large energy storage density, high discharge power, monolithic and the like, can be manufactured in batches, and has wide application prospect.

Description

technical field

[0001] The invention belongs to the technical scope of manufacturing micro-supercapacitors, in particular to a micro-supercapacitor applied to microsystems based on ruthenium oxide active microelectrodes and a preparation method thereof. Background technique

[0002] Miniaturization, miniaturization, and integration of electronic products are the general trend of technological development in the world today. Micro Electro Mechanical Systems (MEMS for short) has the characteristics of mobility, self-control, and integration, and is one of the most important technological innovations in recent years. When a subsystem can be integrated on a chip, the power supply must also complete the revolution of miniaturization and miniaturization. MEMS micro energy system refers to the integration of one or more power supply devices into a micro system with a characteristic size of micron level and a centimeter level based on MEMS technology, which can realize long-term, h...

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