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Micro super capacitor applied for micro system and production process thereof

A supercapacitor and microsystem technology, applied in the manufacture of capacitors, hybrid/electric double-layer capacitors, electrolytic capacitors, etc., can solve the problems of large electrode resistance, achieve low internal resistance, high activity, and improve power storage performance.

Inactive Publication Date: 2009-08-12
TSINGHUA UNIV
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Problems solved by technology

It should be pointed out that the technology of TPL Company in the United States is to first prepare individual micro-supercapacitors, and then install them in the MEMS system, and the electrode prepared by coating the slurry often has a large resistance

Method used

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  • Micro super capacitor applied for micro system and production process thereof

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Embodiment Construction

[0013] The invention proposes a micro supercapacitor applied to a microsystem based on MEMS micromachining technology and a manufacturing method thereof. The micro-supercapacitor adopts a unique inter-electrode support body and a liquid storage cavity space structure, and is composed of positive and negative electrodes of ruthenium oxide and KOH electrolyte sealed in a polyimide encapsulation layer. A micro supercapacitor with high power, simple structure, convenient processing, and reliable performance.

[0014] figure 1 A schematic diagram of the spatial structure of the micro supercapacitor is shown. The structure and process flow of the micro-supercapacitor described in the figure are as follows: a layer of nickel metal film collector 2 and a ruthenium oxide film 5 are prepared on a silicon substrate 1, and an inter-electrode support structure 3 and a ruthenium oxide active film 5 are formed. The wall structure 4 of the liquid storage cavity, and the ruthenium oxide film...

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Abstract

The invention discloses a micro supercapacitor applied to a micro system and a preparation method thereof, which belong to the manufacturing technology range of miniature supercapacitors. The preparation method comprises the following steps: drawing graphs of a micro capacitor and an array thereof on a silicon substrate through a mask and a photoetching method; preparing a layer of a metal film current collector and a layer of a ruthenium-oxide film cathode layer on the silicon substrate; spin-coating a layer of a polyimide sacrifice layer on the layers to obtain a required support body structure and a peripheral liquid storage cavity enclosure structure; spin-coating the sacrifice layer on the layers again and depositing an anode ruthenium-oxide active substance layer and a nickel film current collector layers in turn on the layers; perforating filling holes on the upper nickel layer and an oxide layer to fill an electrolyte in a cavity; and finally, covering a polymer film layer on the whole micro supercapacitor array again to finish an encapsulation process. The micro supercapacitor is provided with the unique support body structure and the liquid storage cavity structure, has the characteristics of small volume, large energy storage density, high discharge power, monolithic and the like, can be manufactured in batches, and has wide application prospect.

Description

technical field [0001] The invention belongs to the technical scope of manufacturing micro-supercapacitors, in particular to a micro-supercapacitor applied to microsystems based on ruthenium oxide active microelectrodes and a preparation method thereof. Background technique [0002] Miniaturization, miniaturization, and integration of electronic products are the general trend of technological development in the world today. Micro Electro Mechanical Systems (MEMS for short) has the characteristics of mobility, self-control, and integration, and is one of the most important technological innovations in recent years. When a subsystem can be integrated on a chip, the power supply must also complete the revolution of miniaturization and miniaturization. MEMS micro energy system refers to the integration of one or more power supply devices into a micro system with a characteristic size of micron level and a centimeter level based on MEMS technology, which can realize long-term, h...

Claims

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Application Information

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IPC IPC(8): H01G9/155H01G9/08H01G9/04H01G9/022H01G11/46H01G11/58H01G11/78H01G11/84
CPCY02E60/13
Inventor 尤政王晓峰张高飞阮殿波
Owner TSINGHUA UNIV
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