Method for optimizing L1<0>-FePt film microstructure
A technology of l10-fept and microstructure, applied in the application of magnetic film to substrate, sputtering coating, ion implantation plating, etc., can solve the uneven grain size distribution of FePt thin film, grain size Coarse, ordered domains are coarse, etc., to achieve the effect of reducing grain size, uniform grain size, and improving microstructure
Inactive Publication Date: 2011-08-10
YANSHAN UNIV
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Studies have shown that this ordering process is mainly affected by the L1 in FePt films. 0 Controlled by the growth of ordered domains, annealing at such a high temperature will inevitably lead to coarse and inhomogeneous ordered domains, which will lead to L1 0 - Abnormal grain growth of FePt film, which eventually leads to FePt film with coarse grain size (20-50nm) and uneven grain size distribution
Although many research works have successfully promoted the ordering of FePt thin films at lower temperatures, due to the promotion of FePt thin films L1 0 Many methods of ordering promote L1 0 The growth of ordered domains is completed, so the coarse and uneven grain size has always been a key problem restricting the application and development of FePt thin films as ultra-high-density magnetic recording media materials.
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[0014] At room temperature, a pristine FePt thin film 4 with a composition ratio of 1:1 was grown on a naturally oxidized Si substrate by magnetron sputtering technology. The FePt film was subjected to high-pressure annealing experiments on a Gleeble-3500 thermal simulator. Experimental device such as figure 1 shown. Place the FePt thin film 4 face down in a high-strength graphite sleeve 3, fill with cubic boron nitride 8 as the pressure transmission medium, and seal it with a graphite cover, then place the high-strength graphite with the FePt thin film 4 Sleeve 3 is packed into an inner diameter equal to the diameter of the graphite sleeve in a die formed by an inner die 6 and an outer die 7, and two opposing indenters 5 are mounted on both sides of the high-strength graphite sleeve 3 . The pressure is vertically applied to the surface of the FePt thin film 4 through the high-strength graphite sleeve 3 by using the two opposing indenters. The pressure is calculated from th...
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The invention discloses a method for optimizing an L10-FePt film microstructure, which adopts a high-pressure technology in the annealing process of a room temperature prepared FePt film in an original state, and the characteristic that high pressure can promote the nucleation of an L10 ordered domain and inhibit the growth of the L10 ordered domain is utilized; the size of the L10 ordered domain in the FePt film is reduced to near 10nm, and the size uniformity of the L10 ordered domain is significantly enhanced. The invention reduces the grain size of the FePt film, and effectively optimizes the microstructure of the L10-FePt film. The method adopts the technological parameters: annealing temperature is 400 to 700 DEG C, annealing time is 2 to 200 min, pressure is 0.2 to 1 GPa, and vacuum is p less than 10<-3>Pa. The invention provides basis for the application and the development of the L10-FePt film which is used as magnetic recording material of super-high density.
Description
technical field [0001] The invention relates to the field of magnetic recording media, in particular to a method for optimizing the microstructure of the most promising ultra-high-density magnetic recording media. Background technique [0002] The rapid development of digital technology requires the transmission and recording of a large amount of information. with L1 0 Ordered FePt thin films have a particularly high magnetic anisotropy constant (K u =(4-7)×10 7 erg / cm 3 ) and thus has a very small superparamagnetic critical dimension (2-3nm) to become a new generation of ultra-high-density magnetic recording medium material. Theory predicts that the magnetic recording density of this medium material can exceed 1TB / in 2 . L1 0 -The microstructure of FePt film has a crucial influence on the improvement of its magnetic recording density and magnetic properties. In order to achieve ultra-high recording density and high signal-to-noise ratio L1 0 - The FePt thin film nee...
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IPC IPC(8): G11B5/851H01F41/18C23C14/14C23C14/35C23C14/58
Inventor 张湘义李晓红
Owner YANSHAN UNIV