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Titanium-containing amorphous carbon high-hardness andwear resistant thin film

An amorphous carbon and amorphous carbon layer technology, applied in the field of materials, can solve problems such as material brittleness and film application limitations, and achieve the effects of improving wear resistance, improving mechanical properties, and reducing friction.

Inactive Publication Date: 2009-12-09
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Generally, the hardness and toughness of materials are in a trade-off relationship, and the suppression of plastic deformation can increase the hardness, but at the same time it leads to the brittleness of the material, which limits the application of the film

Method used

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  • Titanium-containing amorphous carbon high-hardness andwear resistant thin film

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] 1) The titanium-containing amorphous carbon high-hardness and wear-resistant film was prepared by unbalanced magnetron sputtering technology. Choose metal titanium and pure graphite with a purity of 99.8% as the target material, place pure graphite targets and metal titanium targets in four directions perpendicular to the horizontal and at 90 degrees to each other, the graphite targets and metal titanium targets are arranged alternately; the metal substrate is heat-treated High-speed steel or titanium alloy, the distance between the target and the substrate is 15cm, and the rotation speed of the substrate is 4rpm.

[0020] 2) Vacuum the reaction chamber to 4.5×10 -3 Pa, followed by argon, its flow rate is controlled at 25 sccm. The target is self-sputtered for 6 minutes to remove oxides and impurities on the surface. The substrate was cleaned for 30 minutes, and the bias voltage of the substrate was kept at 500V.

[0021] 3) Deposit a pure titanium bottom layer on th...

Embodiment 2

[0026] 1) The titanium-containing amorphous carbon high-hardness and wear-resistant film was prepared by unbalanced magnetron sputtering technology. Choose metal titanium and pure graphite with a purity of 99.8% as the target material, place pure graphite targets and metal titanium targets in four directions perpendicular to the horizontal and at 90 degrees to each other, the graphite targets and metal titanium targets are arranged alternately; the metal substrate is heat-treated High-speed steel or titanium alloy, the distance between the target and the substrate is 15cm, and the rotation speed of the substrate is 4rpm.

[0027] 2) Vacuum the reaction chamber to 4.5×10 -3 Pa, followed by argon, its flow rate is controlled at 25 sccm. The target is self-sputtered for 6 minutes to remove oxides and impurities on the surface. The substrate was cleaned for 30 minutes, and the bias voltage of the substrate was kept at 500V.

[0028] 3) Deposit a pure titanium bottom layer on th...

Embodiment 3

[0033] 1) 1) Using unbalanced magnetron sputtering technology to prepare titanium-containing amorphous carbon high-hardness and wear-resistant films. Choose metal titanium and pure graphite with a purity of 99.8% as the target material, place pure graphite targets and metal titanium targets in four directions perpendicular to the horizontal and at 90 degrees to each other, the graphite targets and metal titanium targets are arranged alternately; the metal substrate is heat-treated High-speed steel or titanium alloy, the distance between the target and the substrate is 15cm, and the rotation speed of the substrate is 4rpm.

[0034] 2) Vacuum the reaction chamber to 4.5×10 -3 Pa, followed by argon, its flow rate is controlled at 25 sccm. The target is self-sputtered for 6 minutes to remove oxides and impurities on the surface. The substrate was cleaned for 30 minutes, and the bias voltage of the substrate was kept at 500V.

[0035] 3) Deposit a pure titanium bottom layer on t...

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Abstract

The invention discloses a titanium-containing amorphous carbon high-hardness and wear resistant thin film. A pure titanium bottom layer, a carbon-titanium complex gradient transition layer and a titanium-containing amorphous carbon layer are deposited on a metal matrix in sequence from the bottom to the top; TiC crystal grains with diameters ranging 5-20nm are dispersively distributed in the titanium-containing amorphous carbon layer; wherein the percentage of carbon atoms is 74.2at.%-98at.%, and the atom percentage of titanium is 2-23.8at.%.The thin film has the advantages of high hardness, good toughness, low friction coefficient, high wear resistance, and good combination strength with the metal matrix, thereby being applied to the surfaces of bearings, gyroscopes, gears and metal cutting tools, so as to improve the service life of the devices; and the thin film also can be applied in biomedicine, such as artificial hip joint surface, and the like.

Description

technical field [0001] The invention relates to a titanium-containing amorphous carbon high-hardness wear-resistant film, which belongs to the technical field of materials. Background technique [0002] Amorphous carbon (a-C) films have high hardness, good chemical stability, low friction coefficient and high wear resistance, so they are widely used in bearings, gyroscopes, gears and metal cutting tools to improve the mechanical properties of materials. performance and wear resistance, prolonging its service life. However, due to the high internal stress (usually reaching more than 10GPa) in the film, the bonding strength between the film and the metal substrate is reduced, the thickness of the film growth is also limited, and it is easy to peel off during use, which is largely limited. tribological applications of amorphous carbon thin films under high loads. In order to reduce the internal stress in the film, the film is usually prepared into a gradient layer structure. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B15/04B32B33/00C23C14/35C23C14/16C23C14/06
Inventor 涂江平李瑞玲洪春福刘东光
Owner ZHEJIANG UNIV
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