Manufacturing method of resistance strain gage based on ion beam technology

A technology of resistance strain gauge and manufacturing method, which is applied in microstructure technology, electric/magnetic solid deformation measurement, photoengraving process of pattern surface, etc., can solve the problems of poor repeatability, strict material requirements, complex process, etc. The effect of high rate, large elastic coefficient and simple process
CN101614522AInactive Publication Date: 2009-12-30SHAANXI ELECTRICAL APPLIANCE RES INST
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Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
SHAANXI ELECTRICAL APPLIANCE RES INST
Publication Date
2009-12-30
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention relates to a manufacturing method of a resistance strain gage based on an ion beam technology. The method comprises the following steps: coating polyimide glue solution on the surface of a high temperature silicon rubber substrate by adopting a DC plasma sputtering technology and a plasma etching technology, hot solidifying the polyimide glue solution to form a flexible polyimide substrate, then peeling off, solidifying to obtain a flexible substrate film with needed strain property requirement, sputtering a resistance alloy film on the polyimide surface of the flexible substrate and finally manufacturing the resistance strain gage by a photoengraving and etching process. The invention has simple process, high rate of finished products, controllable components of the resistance alloy film, adjustable alloy components as required, high image resolution, favorable property of manufactured material, and the like.
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Description

technical field

[0001] The content of the present invention belongs to the technical field of manufacturing testing and measuring devices, and relates to a method for manufacturing a sensitive element for a resistance strain sensorβ€”a miniature foil resistance strain gauge, which can be used to prepare a self-compensating resistance strain gauge with a temperature coefficient of resistance required by the user . Background technique

[0002] Resistance strain gauges, also known as resistance strain gauges, include foil or miniature foil resistance strain gauges, which are resistance strain sensitive elements and can be used to measure unidirectional or multidirectional strain values ​​on the surface of various components. The resistance strain gauge is mainly composed of a sensitive grid and a substrate. The sensitive grid is the most important part of the resistance strain gauge, and its function is to convert the strain of the elastic element into the resistance change; th...

Claims

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