Ultraviolet-cutoff coated glass containing silicon film and preparation method thereof
A technology of coated glass and ultraviolet rays, which is applied in the field of completely cut-off ultraviolet coated glass and its preparation, can solve the problems of difficult control of the amount of cerium ion addition, complicated process, and difficult control of color, etc.
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example 1
[0050] Preparation of completely cut-off ultraviolet coated glass by sputtering method comprises the following steps:
[0051] 1) The glass substrate to be coated is cleaned and dried; the transmittance of the substrate glass to ultraviolet rays in the solar spectrum is 4%;
[0052] 2) The working pressure is 0.30Pa, with Ar and O 2 Reactive sputter deposition, where Ar / O 2 =3:2 (volume ratio), the transition layer tin dioxide, or zinc oxide, or titanium oxide is plated on the glass substrate; or with Ar and N 2 Reactive sputtering deposited silicon nitride film as a transition layer, the working pressure was 0.30Pa, where Ar / N 2 =0.7:1 (volume ratio);
[0053] 3) The working pressure is 0.35Pa, and Ar is used as the working gas. Plating a silicon or silicon alloy film on the transition layer;
[0054] The properties of the obtained completely cut-off ultraviolet coated glass are as follows: the film thickness of the transition layer is 30nm, and the film thickness of sil...
example 2
[0056] Preparation of completely cut-off ultraviolet coated glass by sputtering method comprises the following steps:
[0057] 1) At first, the glass substrate to be coated is cleaned and dried; the transmittance of the substrate glass to ultraviolet rays in the solar spectrum is 4%;
[0058] 2) The working pressure is 0.35Pa, and Ar is used as the working gas. Plating silicon or silicon alloy film directly on the glass substrate;
[0059] The properties of the obtained completely cut-off ultraviolet coated glass are as follows: the film thickness of silicon or silicon alloy is 160nm; the visible light transmittance is 42%, and the ultraviolet cut-off rate of the wavelength below 400nm is 100%; the reflection color of the film layer is yellow; the physical and chemical properties of the coated glass meet the " The national standard stipulated in the "Physical and Chemical Performance Test Standards for Coated Glass".
example 3
[0061] The method of preparing completely cut-off ultraviolet solar control coated glass by sputtering method comprises the following steps:
[0062] 1) The glass substrate to be coated is cleaned and dried; the transmittance of the substrate glass to ultraviolet rays in the solar spectrum is 4%;
[0063] 2) The working pressure is 0.30Pa, with Ar and O 2 Reactive sputter deposition, where Ar / O 2 =3:2 (volume ratio), the transition layer tin dioxide, or zinc oxide, or titanium oxide is plated on the glass substrate; or with Ar and N 2 Reactive sputtering deposited silicon nitride film as a transition layer, the working pressure was 0.30Pa, where Ar / N 2 =0.7:1 (volume ratio); or no transition layer is plated;
[0064] 3) The working pressure is 0.35Pa, and Ar is used as the working gas. Plating a silicon or silicon alloy film on the transition layer or directly on the glass;
[0065] 4) The working pressure is 0.30Pa, using Ar as the working gas to sputter deposit stainles...
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