Method for recovering hydrogen from tail gas containing chlorsilane

A technology of chlorosilane and tail gas, applied in the field of gas separation, can solve the problems of high cost, high impurity content, high energy consumption, etc., and achieve the effect of reducing pressure requirements

Inactive Publication Date: 2010-06-16
CHENGDU SEPMEM SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] The main purpose of the present invention is to address the above-mentioned deficiencies in the prior art, especially for the ordinary pressure swing adsorption method that cannot meet the requirements of removing impurities such as hydrogen chloride and chlorosilane, resulting in low product hydrogen purity, high impurity content, and low hydrogen r...

Method used

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  • Method for recovering hydrogen from tail gas containing chlorsilane
  • Method for recovering hydrogen from tail gas containing chlorsilane
  • Method for recovering hydrogen from tail gas containing chlorsilane

Examples

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Embodiment 1

[0030] This embodiment is a 9-tower pressure swing adsorption method for recovering hydrogen from trichlorosilane tail gas (raw material tail gas), and the flow rate of raw material tail gas is about 200Nm 3 / Hr, the adsorption pressure is about 0.6MpaG; the composition of raw material tail gas is as shown in the following table 2:

[0031] The composition of table 2 embodiment 1 raw material tail gas

[0032] components

H 2

HCl

SiHCl 3 、SiCl 4 、SiH 2 Cl 2

N 2

Composition (V%)

79.00

17.84

2.97

0.19

[0033] In this embodiment, the pressure swing adsorption system is divided into 3 sections (series connection), which are connected by a total of 9 adsorption towers, 3 vacuum pumps, and corresponding program-controlled valves and pipelines. The process flow of each stage is as follows figure 1 As shown, where T201A / B / C is the adsorption tower, V201 is the buffer tank, P201 is the vacuum pump, 1A / B / C, 2A / B / C,...

Embodiment 2

[0041] This embodiment is a 12-tower pressure swing adsorption method for recovering hydrogen from trichlorosilane tail gas (raw material tail gas), and the flow rate of raw material tail gas is about 600Nm 3 / Hr, the adsorption pressure is about 0.5MpaG; the composition of raw material tail gas is as shown in the following table 4:

[0042] The composition of table 4 embodiment 2 raw material tail gas

[0043] components

H 2

HCl

SiHCl 3 、SiCl 4 、SiH 2 Cl 2

N 2

Composition (V%)

79.00

17.84

2.97

0.19

[0044] In this embodiment, the pressure swing adsorption system is divided into 3 sections (series connection), which are connected by a total of 12 adsorption towers, 3 vacuum pumps, and corresponding program-controlled valves and pipelines.

[0045] The process flow of each stage is as follows figure 2 As shown, where T201A / B / C / D is the adsorption tower, V201 is the buffer tank, P201A is the vacuum pump, ...

Embodiment 3

[0053] This embodiment is an 18-tower pressure swing adsorption method for recovering hydrogen from trichlorosilane tail gas (raw material tail gas), and the flow rate of raw material tail gas is about 600Nm 3 / Hr, the adsorption pressure is about 0.7MpaG; the composition of raw material tail gas is as shown in the following table 6:

[0054] The composition of table 6 embodiment 3 raw material tail gas

[0055] components

H 2

HCl

SiHCl 3 、SiCl 4 、SiH 2 Cl 2

N 2

Composition (V%)

79.00

17.84

2.97

0.19

[0056] In this embodiment, the pressure swing adsorption system is divided into 3 sections (series connection), which are connected by a total of 18 adsorption towers, 3 vacuum pumps, and corresponding program-controlled valves and pipelines.

[0057] The process flow of each stage is as follows image 3 As shown, where T101A~F are adsorption towers, V101 and V102 are buffer tanks, P101A is vacuum pump, 1A~...

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Abstract

The invention discloses a method for recovering hydrogen from tail gas containing chlorsilane. The method comprises the following steps of: by a pressure-swing absorption method, performing pressure-swing absorption process for absorption and desorption on raw gas respectively through each absorption tower in a pressure-swing absorption system consisting of at least three absorption towers to obtain purified hydrogen, and performing circulatory operation in each absorption tower respectively according to the conventional pressure-swing absorption process. Absorption agents filled in the absorption towers comprise alumina, silica gel, active carbon and molecular sieves. The method can effectively separate and recover pure hydrogen from gases containing hydrogen, chlorine hydride, chlorsilane and the like, the recovery yield of hydrogen is high, the content of impurities of chlorine hydride, chlorsilane and the like remained in the product is low, the hydrogen purity is high, and simultaneously the components of chlorine hydride, chlorsilane and the like in the product can be separated and recovered. The equipment cost is low, the process is simple, and the energy consumption is low.

Description

technical field [0001] The invention belongs to the technical field of gas separation, in particular to a method for recovering hydrogen from tail gas containing chlorosilanes such as polysilicon or trichlorosilane. Background technique [0002] Under the background of vigorously developing new energy to replace traditional energy in today's society, the polysilicon and trichlorosilane industries are gradually recognized by the public and society, and quickly become a hot spot of attention. However, in the production process, process tail gas mainly containing hydrogen, hydrogen chloride, trichlorosilane and other components will be produced. Its tail gas composition is as shown in following table 1: [0003] Table 1 polysilicon, trichlorosilane tail gas components [0004] components H 2 HCl SiHCl 3 、SiCl 4 、SiH 2 Cl 2 N 2 Composition (V%) 79～96 3～17.84 1～2.97 0～0.19 [0005] Because it contains chlor...

Claims

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Application Information

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IPC IPC(8): B01D53/047C01B3/56
Inventor 张惊涛
Owner CHENGDU SEPMEM SCI & TECH
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