Method and equipment for manufacturing solar battery

A technology of solar cells and manufacturing methods, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve the problems of solar cell performance and quality degradation, affecting solar cell performance, material and financial waste, etc., to avoid product Differences in performance and quality, improved performance and product quality, the effect of eliminating contamination

Active Publication Date: 2010-06-23
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Abstract
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Problems solved by technology

This phenomenon usually affects the performance of solar cells and degrades product quality, especially when manufacturing solar cells on a whole panel. , waste of financial resources

Method used

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  • Method and equipment for manufacturing solar battery
  • Method and equipment for manufacturing solar battery
  • Method and equipment for manufacturing solar battery

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Embodiment Construction

[0021] In order to enable those skilled in the art to better understand the technical solution of the present invention, the solar cell manufacturing method and equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0022] see figure 2 , the solar cell manufacturing method provided by the invention, comprises the following steps:

[0023] 101) Doping impurity atoms into the silicon wafer to form a PN junction.

[0024] Specifically, the required impurities are transported to the surface of the silicon wafer by means of a carrier gas for shallow diffusion. Here, the shallow diffusion refers to the diffusion of impurity atoms on the surface of the silicon wafer and in a relatively shallow depth range below the surface of the silicon wafer, usually the diffusion depth is only a few hundred nanometers. Then, with the help of high temperature treatment, the impurity atoms pre-attached at the shallow layer cont...

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Abstract

The invention relates to a method for manufacturing a solar battery, comprising the following steps: (101), manufacturing and forming a PN junction; (102), depositing an anti-reflection film; (103), judging whether a technological chamber is needed to be cleaned or not, if so, performing the step (104), and otherwise, performing the step (105); (104), cleaning the technological chamber; and (105), manufacturing electrodes. In addition, the invention also relates to equipment for manufacturing the solar battery, comprising the technological chamber, an air intake device, an evacuating device, a PN junction forming module, a deposition module, a control module, a chamber cleaning module and an electrode manufacturing module. By adopting the method and the equipment for manufacturing the solar battery, the technological vacuum chamber is cleaned when judged to need cleaning without machine halt. Therefore, the method and the equipment for manufacturing the solar battery can effectively reduce and even eliminate the condition that attachments on the inner wall of the chamber fall off to cause pollution for a silicon wafer and can improve the production efficiency of the equipment.

Description

technical field [0001] The invention relates to the technical field of photovoltaic power generation, in particular to a method and equipment for manufacturing a solar cell. Background technique [0002] With the continuous consumption of resources such as oil and coal, the problems of environmental pollution and ecological damage are becoming more and more serious. As a kind of green energy, the efficient use of solar energy has become a common goal of all countries in the field of new energy research and development. The birth of solar cells has made mankind a big step towards this goal. On this basis, technicians in this field are making continuous efforts to try to maximize the photoelectric conversion efficiency of solar cells. [0003] As we all know, reducing the reflection of solar cells to light as much as possible is an important way to improve the efficiency of light energy utilization. At present, the commonly used anti-reflection method is to make the surface ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18C23C16/54C23C16/44
CPCY02P70/50
Inventor 荣延栋
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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