The invention relates to a method for manufacturing a solar battery, comprising the following steps: (101), manufacturing and forming a PN junction; (102), depositing an anti-reflection film; (103), judging whether a technological chamber is needed to be cleaned or not, if so, performing the step (104), and otherwise, performing the step (105); (104), cleaning the technological chamber; and (105), manufacturing electrodes. In addition, the invention also relates to equipment for manufacturing the solar battery, comprising the technological chamber, an air intake device, an evacuating device, a PN junction forming module, a deposition module, a control module, a chamber cleaning module and an electrode manufacturing module. By adopting the method and the equipment for manufacturing the solar battery, the technological vacuum chamber is cleaned when judged to need cleaning without machine halt. Therefore, the method and the equipment for manufacturing the solar battery can effectively reduce and even eliminate the condition that attachments on the inner wall of the chamber fall off to cause pollution for a silicon wafer and can improve the production efficiency of the equipment.