Compositions and methods for chemical-mechanical polishing of phase change materials
A phase change material and mechanical polishing technology, applied in the field of polishing composition, can solve the problems of reducing the electrical performance of PCM devices
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Embodiment 1
[0030] This example illustrates the GST oxidation inhibitory activity of lysine in the presence of hydrogen peroxide.
[0031] Individual GST wafers (1 cm × 1 cm, Ge 2 Sb 2 Te 5 ; GST225) were immersed in various aqueous test solutions for about 100 seconds. The control solution had a pH of about 3 and contained about 1% by weight hydrogen peroxide in water. Other test solutions contained about 1% by weight hydrogen peroxide used with benzotriazole (BTA; about 0.1% by weight), lysine (about 1% by weight), or malonic acid (about 3% by weight). Before the wafer was dipped into the test solution, it had a shiny metallic appearance. After soaking, a brown coloration on the surface of the wafer indicated the formation of a GST oxide layer on the surface. The results of these evaluations are shown in Table 1 along with the formulations of the solutions tested. As shown by the information in Table 1, lysine effectively and substantially inhibits the formation of a GST oxide cap...
Embodiment 2
[0035] This example illustrates the GST oxidation inhibitory activity of lysine in the presence of hydrogen peroxide measured using electrochemical measurements.
[0036] GST225(Ge 2 Sb 2 Te 5 ) rotating disk electrode (1 cm in diameter) was immersed in an aqueous solution (pH about 3) containing about 1% by weight lysine and about 1% by weight hydrogen peroxide. Linear sweep voltammetry was performed and the Tafel curve ( figure 1 ). Tafel curves were also obtained by the same procedure using a substantially similar GST electrode immersed in an aqueous solution containing about 3% by weight malonic acid and about 1% by weight hydrogen peroxide at a pH of about 3 ( figure 1 ) for comparison. figure 1 The Tafel curve shows that the corrosion current of the lysine / hydrogen peroxide solution is about 0.22 mA, while the corrosion current of the malonic acid / hydrogen peroxide solution (without lysine) is about 4.5 mA. For comparative use, obtain the Tafel curve (see figure ...
Embodiment 3
[0038] This example illustrates the GST oxidation inhibitory activity of lysine as measured by x-ray photoemission spectroscopy (XPS).
[0039] An XPS experiment using depth profiling with argon sputtering was carried out to determine the oxide layer thickness measured in 0.5% by weight lysine or 3% by weight malonate Obtained by oxidation of GST225 with 1% by weight of hydrogen peroxide (pH 3) in the presence. SiO with known thickness by sputtering 2 specimen to correct for thickness measurements. The oxide thickness is obtained when the oxidation peak disappears after removing about 4 nm of the surface film. Table 2 shows the observed oxide thickness (as SiO 2 equivalent thickness gauge in angstroms). As shown by the data in Table 2, lysine reduced the oxide layer thickness by about 50% for germanium and antimony and about 66% for tellurium.
[0040] Table 2
[0041]
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