Ultraviolet biological chip integrated sensor

A biochip and sensor technology, applied in the field of integrated biological warfare agent sensors, can solve the problems of bulky, inefficient, fragile systems, etc., achieve high sensitivity, reduce detection false alarm rate, and improve detection efficiency

Inactive Publication Date: 2010-08-25
CHANGCHUN UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These LIF detection systems are expensive, inefficient, bulky and fragile systems, which are not conducive to real-time and field use, and cause great obstacles to the application of the system
There is also an obvious disadvantage, because the duty cycle of pulsed ultraviolet light is not high, the detection sensitivity to biological suspended particles is relatively low

Method used

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  • Ultraviolet biological chip integrated sensor
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Experimental program
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Embodiment Construction

[0009] 1. Production of UV filter

[0010] (1) First use the plasma enhanced chemical vapor deposition (PECVD) method to deposit SiO with a thickness of 150nm on the Si-PIN detector 2 layer, as an insulating layer and a diffusion barrier layer.

[0011] (2) Next, use a magnetron sputtering station to sputter an indium tin oxide (ITO) layer with a thickness of 200 nm as the conductive layer and reflective layer of the ultraviolet light emitting tube.

[0012] (3) Finally in SiO 2 A 6H-SiC layer is deposited on the film layer as an ultraviolet filter layer.

[0013] 2. Peel off UV light-emitting diodes

[0014] Using pulsed KrF excimer laser to peel off 340nm, 385nm ultraviolet light-emitting diodes from the sapphire substrate.

[0015] The process steps of excimer laser stripping ultraviolet light-emitting tubes are shown in Figure 1.

[0016] 3. Fabrication of dimethylsiloxane (PDMS) microfluidic chip

[0017] Using deep ion etching technology to fabricate PDMS microflui...

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Abstract

The invention provides an ultraviolet biological chip integrated sensor, and relates to the field of design and manufacturing of biological warfare agent sensors. In the field, all light sources of the conventional LIF detection systems generate ultraviolet light by frequency multiplication of impulsive visible or infrared light; the conventional LIF detection system has the defects of high price, low efficiency, large volume and crispness, and is inconvenient for real-time detection and outdoor use; and the impulsive ultraviolet light is low in duty ratio, and has low detection sensitivity to biological suspended particles, and the light intensity of the conventional continuous ultraviolet light is not high enough to excite the biological suspended particles to fluoresce; and all these problems are great obstacles in the application of the detection system. The ultraviolet biological chip integrated sensor of the invention uses multi-wavelength ultraviolet LEDs as excitation light sources and overcomes the defects of the conventional light source; the multi-wavelength ultraviolet LEDs, an Si-PIN detector and an ultraviolet filter plate are integrated on the same substrate, so that the sensor has the capability of detecting and identifying various biological warfare agents and can meet the light, firm, quick-response and high-sensitivity use requirements of the field environmental on the detector while improving the detection efficiency and lowering a detection false alarm rate.

Description

technical field [0001] The invention relates to an integrated biological warfare agent sensor, in particular to the field of manufacturing technology and structural design of the biological warfare agent sensor. Background technique [0002] With the development of genetic engineering and other biological technologies, the mass production of biological warfare agents has become relatively easy. Biological and chemical weapons have posed a serious threat to social and regional stability as well as world peace. Therefore, it is imminent to enhance the protection of biological warfare agents in the national defense system. [0003] At the International Conference on the Prohibition of Chemical Weapons held at the end of 1993, nearly 400 toxins were listed. Studies have shown that there are several types of toxins that are not only extremely toxic (only a few kilograms or tens of kilograms can constitute a human body within 100 square kilometers) damage), and can be produced i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/64H01L21/77H01L33/00
Inventor 曲轶赵强杨旭李辉张斯钰赵博刘国军薄报学
Owner CHANGCHUN UNIV OF SCI & TECH
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