Bionic micro/nano structure preparing method

A technology of micro-nano structure and nano-structure, applied in the field of bionic micro-nano structure preparation, can solve the problems of difficulty in preparing a complete structure, expensive equipment, slow processing speed, etc., and achieve the effect of promoting preparation and application and low cost

Inactive Publication Date: 2010-09-08
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, for the typical complex biomimetic structure combining micro-nano (scale changes from tens of nanometers to hundreds of microns), it is difficult to prepare a complete structure by conventional processes
The current research, or directly

Method used

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  • Bionic micro/nano structure preparing method
  • Bionic micro/nano structure preparing method

Examples

Experimental program
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Effect test

Embodiment 1

[0020] Example 1. Preparation of micro-nano structure on the surface of imitating butterfly phosphor wings.

[0021] The embodiment 1 of the present invention is used to prepare the micro-nano structure on the surface of imitating butterfly phosphor wings. figure 1 . A layer of SiO is thermally grown on the surface of Si substrate 2 , Using photolithography technology to transfer the micro-scale pattern on the mask to the spin-coated photoresist surface, and put the exposed film into the developer to dissolve the unnecessary photoresist to obtain the required etching The pattern with resist protection is further used RIE dry etching to transfer the pattern to SiO 2 . Using ICP deep etching, a periodic or quasi-periodic micro-scale structure is obtained, and the sidewall must retain sufficient corrugation depth during ICP etching. Then, an electron beam evaporation process is used to evaporate the nano-structure growth seed obliquely, and then grow the nano-structure directionall...

Embodiment 2

[0030] Example 2. Preparation of the micro-nano structure on the surface of the imitation gecko foot.

[0031] Example 2 of the present invention is used to prepare the micro-nano structure on the surface of the imitation gecko foot. figure 2 . A layer of SiO is thermally grown on the surface of Si substrate 2 , Using photolithography technology to transfer the micro-scale pattern on the mask to the spin-coated photoresist surface, and put the exposed film into the developer to dissolve the unnecessary photoresist to obtain the required etching The pattern with resist protection is further used RIE dry etching to transfer the pattern to SiO 2 . Using ICP deep etching, micro-scale structures with periodic / quasi-periodic distribution are obtained. Then, the electron beam evaporation process is used to evaporate the nanostructure growth seeds on the top of the microscale structure, and then the nanostructures are grown directionally to obtain the micro-nano structure on the surfa...

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Abstract

The invention provides a bionic micro/nano structure preparing method by combining top-down and bottom-up modes, which comprises the following steps of: firstly, preparing a microscale structure serving as a substrate by the top-down method which mainly comprises film growing, photoetching, dry etching and the like; secondly, selectively performing evaporative deposition on seeds for growing a nano structure on the top or the side wall of the microscale substrate; thirdly, growing the direction controllable nano structure from the seeds by the bottom-up method; and finally, preparing the hierarchical layering period/standard period bionic micro/nano structure with excellent characteristics, such as gecko seta-simulated micro/nano structure, morpho lepidoptera-simulated micro/nano structure and the like. The method is an integrated preparation method by combining the top-down and bottom-up preparation processes, has the characteristics of high efficiency and low cost, is suitable for massive large-area production and is a new effective way for massive preparation and application of the bionic micro/nano structure.

Description

Technical field: [0001] The invention belongs to the field of micro-nano processing, and specifically relates to a method for preparing a bionic micro-nano structure combining top-down and bottom-up, and is suitable for high-efficiency and low-cost mass production of biomimetic micro-nano structures such as butterfly phosphor wings , Imitate the micro-nano structure of gecko feet, and promote the preparation and application of bionic micro-nano structures. Background technique: [0002] After the natural selection of "survival of the fittest" and hundreds of millions of years of evolution, the surface of natural organisms has shown a variety of functions and formed many unique structures and excellent characteristics. Studies have found that the unique functions of organisms are closely related to the surface, especially the surface microstructure, and the surface microstructure shows a certain rule, which is determined by the basic structure of micro and nano It is arranged reg...

Claims

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Application Information

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IPC IPC(8): B81C1/00B82B3/00
Inventor 廖广兰王中林彭争春史铁林高阳
Owner HUAZHONG UNIV OF SCI & TECH
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