Simplified industrial method for recovering silicon carbide from mortar generated in cutting process of silicon wafers
A silicon wafer cutting, industrial method technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of declining cutting quality and efficiency, inability to produce qualified silicon wafers, and low removal efficiency of fine particles. Achieve the effect of avoiding difficult sorting, high comprehensive utilization efficiency of resources, and reducing size sorting processes
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Embodiment 1
[0033] The invention is used to process silicon wafer cutting mortar, wherein the mass ratio of silicon carbide and polyethylene glycol suspension is 1:1, the mass ratio of silicon carbide in the mortar is 45%, and the silicon carbide used comes from Zhengzhou Haiwang Micro Powder Co., Ltd. The specific steps are as follows:
[0034] Step 1: Send 1000Kg of mortar that has been pretreated to remove large particles of impurities into a 5000L mixing tank through a delivery pump, start stirring for 10 minutes, add diluent 2000L ethanol within 20 minutes, and measure its viscosity at 16.7cps.
[0035] Step 2: Send the mixture of mortar and diluent that is uniformly stirred above to the precision precision plate and frame filter at a flow rate of 500Kg / h. The filtering form is filter residue self-discharging, and the filtration accuracy of the precision precision plate and frame filter is set to 10 μm , and filtered to obtain solid components. Collect the filtered liquid for later ...
Embodiment 2
[0040] The invention is used to process silicon wafer cutting mortar, wherein the mass ratio of silicon carbide and polyethylene glycol suspension is 1:1, the mass ratio of silicon carbide in the mortar is 45%, and the silicon carbide used comes from Zhengzhou Haiwang Micro Powder Co., Ltd. The specific steps are as follows:
[0041] Step 1: Send 1000Kg of the mortar that has been pretreated to remove large particles of impurities into a 5000L mixing tank through a delivery pump, start stirring for 10 minutes, add diluent 1500L acetone within 20 minutes, and measure its viscosity at 17.3cps.
[0042] Step 2: Send the above-mentioned uniformly stirred mortar and diluent mixture to the laminated precision filter at a flow rate of 400Kg / h. The filter form is filter residue collection, and the filtration precision of the laminated precision filter is set to 6.5 μm. Filter to obtain solid components. Collect the filtered liquid for later use.
[0043] Step 3, transfer the solid m...
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