Simplified industrial method for recovering silicon carbide from mortar generated in cutting process of silicon wafers

A silicon wafer cutting, industrial method technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of declining cutting quality and efficiency, inability to produce qualified silicon wafers, and low removal efficiency of fine particles. Achieve the effect of avoiding difficult sorting, high comprehensive utilization efficiency of resources, and reducing size sorting processes

Inactive Publication Date: 2010-11-03
JIANGSU JIAYU RESOURCE UTILIZATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The on-line separation of fine particles from the higher viscosity mortar system is mostly based on physical separation technology. The removal efficiency of fine particles is low, especially the tiny particles attached to and wrapped on the surface are almost impossible to remove, which also leads to these untreated particles. The fine particle impurities that are completely removed will continue to increase with the cutting process, and will continue to be enriched in the mortar system, cutting quality and efficiency will gradually decline, and eventually lead to the inability to produce qualified silicon wafers

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] The invention is used to process silicon wafer cutting mortar, wherein the mass ratio of silicon carbide and polyethylene glycol suspension is 1:1, the mass ratio of silicon carbide in the mortar is 45%, and the silicon carbide used comes from Zhengzhou Haiwang Micro Powder Co., Ltd. The specific steps are as follows:

[0034] Step 1: Send 1000Kg of mortar that has been pretreated to remove large particles of impurities into a 5000L mixing tank through a delivery pump, start stirring for 10 minutes, add diluent 2000L ethanol within 20 minutes, and measure its viscosity at 16.7cps.

[0035] Step 2: Send the mixture of mortar and diluent that is uniformly stirred above to the precision precision plate and frame filter at a flow rate of 500Kg / h. The filtering form is filter residue self-discharging, and the filtration accuracy of the precision precision plate and frame filter is set to 10 μm , and filtered to obtain solid components. Collect the filtered liquid for later ...

Embodiment 2

[0040] The invention is used to process silicon wafer cutting mortar, wherein the mass ratio of silicon carbide and polyethylene glycol suspension is 1:1, the mass ratio of silicon carbide in the mortar is 45%, and the silicon carbide used comes from Zhengzhou Haiwang Micro Powder Co., Ltd. The specific steps are as follows:

[0041] Step 1: Send 1000Kg of the mortar that has been pretreated to remove large particles of impurities into a 5000L mixing tank through a delivery pump, start stirring for 10 minutes, add diluent 1500L acetone within 20 minutes, and measure its viscosity at 17.3cps.

[0042] Step 2: Send the above-mentioned uniformly stirred mortar and diluent mixture to the laminated precision filter at a flow rate of 400Kg / h. The filter form is filter residue collection, and the filtration precision of the laminated precision filter is set to 6.5 μm. Filter to obtain solid components. Collect the filtered liquid for later use.

[0043] Step 3, transfer the solid m...

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Abstract

The invention relates to a simplified industrial method for recovering silicon carbide from mortar generated in cutting process of silicon wafers. The method comprises the steps of: 1. adding diluent in the cutting mortar for reducing system viscosity; 2. carrying out primary separation on the mortar subjected to viscosity reduction by using a precise filter A, and setting and controlling filtering precision according to the requirement of silicon material wire-electrode cutting on the particle size distribution of a silicon carbide abrasive to obtain a solid component S1; 3. carrying out alkali wash, acid wash and rinse on the solid component S1, drying a wet material to directly obtain high-quality silicon carbide which meets the requirement of the silicon material wire-electrode cutting; 4. carrying out secondary separation on the mortar fluid subjected to the primary separation by using a precise filter B, and controlling the filtering precision to ensure that smallest passing particles which can be retained are below 2mu m so as to obtain a solid substance S2, and then separating clear liquid; and 5. carrying out alkali wash, acid wash and rinse on the solid component S2 obtained after secondary separation, drying a wet material to collect and obtain silicon carbide micropowder which has smaller particle size and can be used in other industrial occasions.

Description

technical field [0001] The invention relates to a simple industrial method for recovering silicon carbide from silicon wafer cutting mortar. The application field is mainly the resource utilization of silicon wafer cutting and processing mortar in the solar energy industry and silicon wafer cutting and processing mortar in the electronics industry. The silicon carbide products recovered from the mortar can be reused for wire cutting processing of silicon materials, and can also be used in other places where commercial silicon carbide is applicable. technical background [0002] Silicon wafers are an important foundation for the development of the solar industry. In the process of silicon wafer processing, cutting silicon rods (ingots) into sheets of a certain thickness by special wire cutting equipment is the current international processing method. With the rapid development of the global solar energy industry, the processing volume and demand of silicon wafers have incre...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/36C10M175/00H01L21/304
Inventor 刘来宝朱志翔孙余凭
Owner JIANGSU JIAYU RESOURCE UTILIZATION
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