Tracking testing system of resonant frequency of quartz crystal microbalance and method thereof

A technology of quartz crystal and test system, which is applied in the direction of measuring resonance frequency, weighing equipment testing/calibration, measuring devices, etc. It can solve the problems of noise reduction measurement accuracy, interference with serial resonance, and influence on UA ​​signal phase, etc.

Inactive Publication Date: 2010-11-03
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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Problems solved by technology

[0009] The main disadvantage of this type of circuit is that the QCM and compensation components are connected to a more complex network, which includes operational amplifiers
The non-ideal characteristics of the operational amplifier itself, such as input current, input impedance, and hysteresis, will affect the phase of the UA signal and interfere with the series resonance. At the same time, the influence of the para...

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  • Tracking testing system of resonant frequency of quartz crystal microbalance and method thereof
  • Tracking testing system of resonant frequency of quartz crystal microbalance and method thereof
  • Tracking testing system of resonant frequency of quartz crystal microbalance and method thereof

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Embodiment Construction

[0053] A multi-frequency QCM sensor system for digital circuit measurement of the present invention, its principle, algorithm and circuit will be described below in conjunction with the accompanying drawings and specific implementation methods.

[0054] The measurement principle designed in this patent is to use a digital frequency synthesizer (DDS) to generate a driving signal close to the QCM serial resonance frequency, input the analog circuit network containing QCM, and the ADC uses 4 / (2N+1) (N=0 , 1, 2, 3, 4...) Frequency multiplication samples the output of the analog circuit network containing QCM, and the result is calculated to obtain the amplitude and phase of the output signal. The system calculates the admittance of the QCM according to the input and output signals, and then calculates the series resonance frequency f according to the Lorentz formula res and the series resonant conductance G max . Then change the driving frequency to make it close to f res , and...

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Abstract

The invention discloses a tracking testing system of the resonant frequency of a quartz crystal microbalance and a method thereof, the tracking testing system comprises an analog circuit testing network and is characterized in that the tracking testing system further comprises a digital frequency synthesizer, a homologous frequency multiplication signal generation module, a high-speed analog-digital converter ADC, a signal processing module and a feedback tracking module, wherein the high-speed analog-digital converter ADC is used for generating a frequency multiplication signal which is homologous with a driving signal and has the frequency of 4/(2N plus 1); a voltage signal outputted by a sampling module is amplified by an operational amplifier and then directly enters into the high-speed analog-digital converter ADC for carrying out conversion and output; the signal processing module is used for calculating the serial complex admittance of a QCM chip according to Kirchhoff laws, and approximately calculating the difference between the current frequency and the series resonant frequency of the QCM and the serial impedance of the chip; and the feedback tracking module is used for changing the output frequency of the digital frequency synthesizer, leading the output frequency to approximate the serial resonant frequency of the QCM, and repeating the implementation for realizing the tracking of the serial resonant frequency of the QCM.

Description

technical field [0001] The invention relates to a testing method for a quartz crystal microbalance (QCM), in particular to a tracking test system and a method for resonant frequency of the quartz crystal microbalance. Background technique [0002] Quartz crystal microbalance is a micromass detection technology that applies the principle of piezoelectric resonance. Its basic principle is to use the piezoelectric effect of quartz crystal: applying mechanical force on both sides of the wafer will cause the charge center of the lattice to shift and polarize, and an electric field will be generated in the corresponding direction of the wafer; otherwise, if When an electric field is applied to the two electrodes of the quartz crystal, the wafer will be mechanically deformed. If the electric field is an alternating electric field, it will cause mechanical oscillation in the crystal lattice. When the alternating frequency is consistent with the natural mechanical oscillation freque...

Claims

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Application Information

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IPC IPC(8): G01H13/00G01G3/16G01G23/01
Inventor 马宏伟李振涵
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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