Solar cell having double-sided micro/nano composite structure and preparation method thereof

Abstract

The invention discloses a solar cell having a double-sided micro/nano composite structure and a preparation method thereof. The solar cell comprises a first micro/nano composite structure which is positioned on the front of the solar cell and a second micro/nano composite structure which is positioned on the back of the solar cell; the first micro/nano composite structure comprises a doped diffusion layer which is manufactured on the surface of a silicon-based substrate, a front micro-scale light absorption layer corroded on the doped diffusion layer, and a front nano-scale black silicon antireflection layer etched on the front micro-scale light absorption layer; the second micro/nano composite structure comprises a back micro-scale light absorption layer corroded on the lower surface of the silicon-based substrate, and a back nano-scale black silicon antireflection layer etched on the back micro-scale light absorption layer. The problems that a black silicon material layer replaces the micro-scale light absorption layer, and the absorption range of the solar spectrum is widened but the conversion efficiency is low in the traditional black silicon solar cell structure are solved.

Description

technical field [0001] The invention relates to the technical field of silicon-based solar cells, in particular to a solar cell with a double-sided micro-nano composite structure and a preparation method thereof. Background technique [0002] Solar energy has huge reserves, is clean and pollution-free, and is an inexhaustible energy source, known as the first emerging energy source in the 21st century. Using the photovoltaic effect of semiconductor materials to directly convert solar energy into electrical energy is a research hotspot all over the world. Among them, silicon-based solar cells have become the first choice for solar power generation technology due to their abundant raw material reserves and mature process technology. Since the photoelectric conversion efficiency is still very low, the unit cost of power generation of silicon-based solar cells remains high, which has become the biggest problem restricting the application and development of silicon-based solar ce...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a solar cell with a double-sided micro-nano composite structure and its preparation method, which combines the characteristics of high light absorption and conversion rate of the micro-scale structure with the ultra-broadband extremely low reflectivity and self-cleaning of the nano-scale black silicon structure. The characteristics are combined, and a solar cell with a double-sided micro-nano composite structure is formed to solve the problem that traditional silicon-based solar cells have a narrow absorption spectrum range, cannot effectively absorb and convert sunlight with wavelengths above 1.2 μm, and the efficiency of solar cells based on nanoscale black silicon structures low problem

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