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Barium strontium titanate multilayered film, and preparation method thereof

A multi-layer thin film, barium strontium titanate technology, applied in the direction of chemical instruments and methods, titanium compounds, layered products, etc., can solve the problems of high tuning rate, low dielectric loss, and application requirements, and achieve superior performance , low production cost, high dielectric constant and high tuning rate

Inactive Publication Date: 2011-11-02
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Application Information

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Problems solved by technology

From the results of these literature reports, most of them are prepared with a single component barium strontium titanate (Ba x Sr 1-x TiO 3 ) film, because the single-component barium strontium titanate film usually cannot have high tuning rate and low dielectric loss at the same time, it cannot meet the application requirements

Method used

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  • Barium strontium titanate multilayered film, and preparation method thereof
  • Barium strontium titanate multilayered film, and preparation method thereof
  • Barium strontium titanate multilayered film, and preparation method thereof

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Embodiment Construction

[0028] Barium strontium titanate (Ba 0.7 Sr 0.3 TiO 3 / Ba 0.5 Sr 0.5 TiO 3 ) 2 Preparation of multilayer films by chemical solution deposition:

[0029] First, clean the used utensils, soak the beaker, dropper, syringe, weighing bottle, and glass rod with 15% dilute nitric acid for 24 hours, then rinse with tap water, rinse with deionized water for several times, and then rinse with alcohol. Bake the cleaned utensils at 50° C. for 2 hours before use.

[0030] 1. Ba 0.5 Sr 0.5 TiO 3 Preparation of precursor colloid

[0031] Analytical pure barium acetate, strontium acetate and butyl titanate are used as solutes, and ethylene glycol methyl ether and acetylacetone are used as solvents;

[0032] (1) Weigh 0.0015 moles of barium acetate and 0.0015 moles of strontium acetate and add in a beaker filled with 5 milliliters of acetic acid, stir at 70°C until barium acetate and strontium acetate are completely dissolved;

[0033] (2) Weigh 0.003 mol of butyl titanate, add it ...

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Abstract

The invention discloses a barium strontium titanate multilayered film, and a preparation method thereof. According to the invention, barium acetate, strontium acetate and tetrabutyl titanate with certain molar ratios are dissolved into an acetic acid solution, an ethylene glycol methyl ether solution and an acetylacetone solution, such that stable precursory sols with different barium-strontium ratios are prepared. Sol distribution processes and heat treatment processes are alternatively carried out upon substrates such as silicon-based platinum, until a required thickness is reached. According to the invention, the barium strontium titanate multilayered structure is prepared with a chemical solution deposition method. With the method, a film material with high tuning rate and low dielectric loss can be obtained. The film can be used in microwave tuning devices.

Description

technical field [0001] The invention relates to a barium strontium titanate multilayer film and a preparation method thereof, belonging to the field of functional information materials. Background technique [0002] Barium strontium titanate (Ba x Sr 1-x TiO 3 , BST) thin film materials have broad application prospects in the next generation of dynamic random access memory and microwave tuning devices due to their superior dielectric properties. Compared with many preparation methods, the chemical method has many advantages such as good uniformity, easy control of the stoichiometric ratio, and simple equipment, and has been widely used in the preparation of thin film materials. In recent years, there have been many reports on the preparation of barium strontium titanate thin film materials by chemical methods, such as: "Synthesis and dielectric characteristic of Ba 1-x Sr x TiO 3 thin films-based strontium-barium alkoxides derivatives", MaterialsChemistry and Physics.6...

Claims

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Application Information

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IPC IPC(8): B32B9/04C01G23/00
Inventor 常青戴建明朱雪斌吴大俊张伟杰孙玉平
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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