The invention relates to a matrix material for MALDI, in particular to application of fluoride nanometer materials as a matrix in MALDI-MS. The fluoride nanometer materials are nano-particles with various shapes of ytterbium trifluoride, lanthanum trifluoride, cerium trifluoride, praseodymium trifluoride, neodymium trifluoride, samarium trifluoride, europium trifluoride, gadolinium trifluoride, terbium trifluoride, dysprosium trifluoride, holmium trifluoride, erbium trifluoride, thulium trifluoride, ytterbium trifluoride or lutetium trifluoride, or nano-particles of trifluorides compounded byany two or more of ytterbium, lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium or lutetium in any proportion. The invention takes rare earth fluoride nanometer materials as the matrix of the MALDI-MS for the first time, develops the matrix of the MALDI-MS with simple and convenient operation and strong universality, and realizes the quick and accurate analysis of the MALDI-MS.