Preparation method of germane gas

Abstract

The invention provides a preparation method of germane gas. According to the method, a sodium hydroxide solution of sodium borohydride is prepared; polyether with a volume of 0.5% to 5% of that of the solution is added to the solution; and a tetrahydrofuran solution of germanium tetrachloride is added to the solution for preparing germane gas. Compared to previously disclosed methods, according to the present method, polyether is added to the reaction solution, such that a substantial effect is brought in, generation of yellow precipitate is greatly reduced, and a conversion rate of germane is improved by approximately 7%.

Description

technical field

[0001] The invention relates to a method for preparing germane gas, in particular to a method for preparing germane by adding polyether to a reaction solution to increase the conversion rate. Background technique

[0002] High-purity germane is an important raw material gas for the semiconductor industry. It has been gradually applied to metal organic compound vapor phase epitaxy (MOVPE) to prepare germanium-containing semiconductor materials or devices, such as germanium-silicon thin-film solar cells.

[0003] There are many ways to prepare germane. The early method is to use LiAlH in ether medium 4 Reduced GeCl ４ to prepare germane; the classical method for preparing germane is Mg ２ Ge is hydrolyzed in dilute acid (such as hydrochloric acid) solution; Ge(IV) in aqueous solution is reduced to germane by reducing agent or electrolysis; germane can also be produced by reducing Ge(IV) in acidic solution with sodium borohydride ; A better way to prepare germa...