Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Al-Ti-Si alloy target material and preparation method thereof

A silicon alloy and target technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problem of inability to meet the use requirements of the coating layer on the surface of the tool and mold, and achieve the goal of promoting the use and production. The effect of low cost and short process flow

Inactive Publication Date: 2012-01-18
余鹏
View PDF2 Cites 27 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In practical applications, there are higher requirements for the performance of tools and molds. The existing pure titanium or titanium-aluminum alloy targets can no longer meet the requirements for the use of coating layers on the surfaces of tools and molds.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Al-Ti-Si alloy target material and preparation method thereof
  • Al-Ti-Si alloy target material and preparation method thereof
  • Al-Ti-Si alloy target material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] The aluminum-titanium-silicon alloy target of the present invention is made of the following raw materials in mass percentage: 9% aluminum, 90% titanium, and 1% silicon;

[0027] The average particle size of the aluminum powder is 10 μm;

[0028] The average particle size of the titanium powder is 10 μm;

[0029] The average particle size of the silicon powder is 10 μm;

[0030] The purity of the aluminum powder is 99.6%, the purity of the titanium powder is 99.5%, and the purity of the silicon powder is 99.9%.

[0031] The preparation method of the aluminum-titanium-silicon alloy target in this embodiment includes the following steps:

[0032] (1) Weigh aluminum powder, titanium powder, and silicon powder, and mix them in a three-dimensional mixer for 0.5 hours. During the mixing process, fill the mixing cylinder with argon gas to reduce oxidation during the powder mixing process;

[0033] (2) Put the uniformly mixed aluminum, titanium and silicon mixed powder i...

Embodiment 2

[0039] The aluminum-titanium-silicon alloy target of the present invention is made of the following raw materials in mass percentage: 90% aluminum, 5% titanium, and 5% silicon;

[0040] The average particle size of the aluminum powder is 25 μm;

[0041] The average particle size of the titanium powder is 200 μm;

[0042] The average particle size of the silicon powder is 200 μm;

[0043] The purity of the aluminum powder is 99.4%, the purity of the titanium powder is 99.2%, and the purity of the silicon powder is 99.3%.

[0044] The preparation method of the aluminum-titanium-silicon alloy target of the present invention comprises the following steps:

[0045] (1) Weigh aluminum powder, titanium powder, and silicon powder, and mix them in a three-dimensional mixer for 6 hours. During the mixing process, fill the mixing cylinder with argon gas to reduce oxidation during the powder mixing process;

[0046] (2) Put the uniformly mixed aluminum, titanium and silicon mixed p...

Embodiment 3

[0052] The aluminum-titanium-silicon alloy target of the present invention is made of the following raw materials in mass percentage: aluminum 67%, titanium 30%, silicon 3%;

[0053] The average particle size of the aluminum powder is 10 μm;

[0054] The average particle size of the titanium powder is 100 μm;

[0055] The average particle size of the silicon powder is 100 μm;

[0056] The purity of the aluminum powder is 99.5%, the purity of the titanium powder is 99.5%, and the purity of the silicon powder is 99.5%.

[0057]The preparation method of the aluminum-titanium-silicon alloy target in this embodiment includes the following steps:

[0058] (1) Weigh aluminum powder, titanium powder, and silicon powder, and mix them in a three-dimensional mixer for 3 hours. During the mixing process, fill the mixing cylinder with argon gas to reduce oxidation during the powder mixing process;

[0059] (2) Put the uniformly mixed aluminum, titanium and silicon mixed powder in the mo...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
particle sizeaaaaaaaaaa
particle sizeaaaaaaaaaa
service temperatureaaaaaaaaaa
Login to View More

Abstract

The invention relates to an Al-Ti-Si alloy target and a preparation method thereof. The Al-Ti-Si alloy target is prepared from the following raw materials in percent by weight: 5-90% of aluminum, 5-90% of titanium and 1-30% of silicon. The invention also comprises a hot-pressing and sintering preparation method of the Al-Ti-Si alloy target. In the Al-Ti-Si alloy target and the hot-pressing and sintering preparation method thereof which are provided by the invention, components of the alloy are uniform, relative density of the alloy target is high, technological process is short, and production cost is low, thus the alloy and the preparation method thereof are beneficial to popularization and application.

Description

technical field [0001] The invention relates to a target material for surface modification coating of materials and a preparation method thereof, in particular to an aluminum-titanium-silicon alloy target material and a preparation method thereof. Background technique [0002] Surface modification of materials is an important method to improve the comprehensive performance of materials. Various metals, alloys, inorganic materials, and polymer materials can improve surface hardness, wear resistance, and corrosion resistance through surface coating, and can change the properties of materials. Surface color, enhance the decorative performance of the material. The target is the key material used in the vacuum sputtering coating of materials, and the basic method of coating the material surface is to make the ion beam hit the target surface through glow discharge. With the development of surface thin film technology, the target material is also constantly updated. [0003] In t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C22C21/00C22C14/00C22C30/00C23C14/06
Inventor 余鹏
Owner 余鹏
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com