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Method for producing large high-purity molybdenum planar target material for flat panel displays

A production process and display technology, applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve problems such as uneven coating thickness, fragility, and large fracture risk, and improve product quality and reliability Effect

Active Publication Date: 2012-03-28
丰联科光电(洛阳)股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In order to meet the length requirement, the traditional process of welding by several short target materials has more fine structures and pores in the weld seam, which causes uneven etching and uneven coating thickness.
Moreover, the molybdenum target is extremely fragile in the welding area, and has a relatively large risk of fracture

Method used

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  • Method for producing large high-purity molybdenum planar target material for flat panel displays
  • Method for producing large high-purity molybdenum planar target material for flat panel displays
  • Method for producing large high-purity molybdenum planar target material for flat panel displays

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Embodiment Construction

[0085] The embodiments of the present invention are given to illustrate the present invention, but do not constitute any limitation to the present invention.

[0086] Taking the finished product specification length × width × height = 1700mm × 200mm × 20mm as an example, according to the characteristics and technical requirements of large-scale high-purity molybdenum planar targets, the processing technology is determined as follows:

[0087] 1. Molybdenum powder analysis: brand: FMo-1, use ICP atomic absorption spectrometry to analyze the purity of molybdenum powder, Mo content ≥ 99.5%, control the content of impurities:

[0088] Fe<0.005;Sn<0.0005;Ni<0.003;Sb<0.010;Si<0.002;Cd<0.0005;

[0089] Al<0.0015;C<0.005;Ca<0.0015;N<0.015;Mg<0.002;O<0.2;

[0090] Cu<0.001;W<0.05;Pb<0.0005;Bi<0.0005

[0091] 2. Powder selection: Use a 200-mesh sieve to screen the molybdenum powder;

[0092] 3. Powder blending: the purpose is to obtain powders with different particle size combination...

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Abstract

The invention relates to a production technology of a planar high-purity molybdenum target material and discloses a method for producing a large high-purity molybdenum planar target material for flat panel displays, comprising the steps of: molybdenum powder analysis, powder selection, powder blending, die filling, pressing, sintering, rolling, annealing, width milling, wire cutting of end faces,chamfering and grinder machining. The planar high-purity molybdenum target material machined by the method has the following beneficial effects that: the length of the molybdenum target material can be up to 2700mm; the molybdenum content is greater than or equal to 99.95%; the relative density is greater than or equal to 99%; the grain structure is uniform; the flatness is less than 0.05; the surface roughness is Ra0.2; the surface is free of the defects such as flaws, peeling, folding, dents, metal or nonmetal pressed articles and the like; the lengths of internal flaws in the target material are not greater than 0.04mm; and no air bubbles and large crystals are generated.

Description

technical field [0001] The invention relates to a production technology of a flat high-purity molybdenum target, in particular to a production process method of a large-scale high-purity flat molybdenum target used as a large-scale flat panel display electrode or wiring material, mainly involving thickness h≤20mm, length L The production process method of large-scale high-purity molybdenum target material of ≥1700mm. Background technique [0002] Molybdenum is a silver-white metal with a melting point of 2617°C and a boiling point of 4612°C. It has good corrosion resistance and stability at room temperature, and has excellent high-temperature strength, good electrical conductivity and thermal expansion properties. It is used in aerospace industry, electronics industry, glass There are a wide range of applications in industries such as manufacturing and solar photovoltaics. [0003] With the rapid development of the electronic information industry, the application of thin fi...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/14
Inventor 赵文普赵士刚王健
Owner 丰联科光电(洛阳)股份有限公司
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