Laser feedback effect-based microscopic three-dimensional profile measurement system
A three-dimensional shape and microscopic measurement technology, which is applied in the field of measuring instruments, can solve problems such as high cost and complex structure of the three-dimensional shape measurement system, and achieve low equipment costs, outstanding three-dimensional shape microscopic imaging capabilities, and simple structure Effect
Inactive Publication Date: 2012-05-02
UNIV OF SHANGHAI FOR SCI & TECH
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[0003] The present invention aims at the problem of complex structure and high cost of the current three-dimensional shape measurement system of objects, and proposes a three-dimensional shape microscopic measurement system based on the laser feedback effect, which can significantly simplify the structure of the confocal imaging system, reduce the cost of the equipment, and Practical
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[0007] Such as figure 1 The schematic diagram of the three-dimensional shape microscopic measurement system based on the laser feedback effect is shown in the figure. The laser light emitted by the semiconductor laser 1 is converted into parallel light by the collimator lens 2, and a part of the laser light passes through the beam splitter 3, and the beam direction is changed by the reflector 4, and then The incident microscopic objective lens 5 converges and irradiates the surface of the measured object 6 placed on the stage 7. The scattered light generated by the focal point can be collected by the microscopic objective lens 5 and fed back to the laser 1 along the original optical path. The feedback light of the feedback light cannot enter the laser. After the feedback light enters the laser cavity, it consumes the carriers in the resonant cavity and reduces the laser emission power. Send it into the computer 9; the computer 9 outputs control signals to the drive circuit, wh...
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The invention relates to a laser feedback effect-based microscopic three-dimensional profile measurement system. The emergent light of a semiconductor laser is collimated into collimated light, and the collimated light is then focused by a microscopic objective to irradiate the surface of a measured object. The luminous point of the semiconductor laser and the focus of the light beam have conjugate imaging relation. The scattered light generated at the focus can be collected by the objective and fed back into the resonant cavity of the semiconductor laser, however, the feedback light generated by the defocusing plane cannot enter the active region because the conjugate relation is destroyed, the feedback light consumes current carriers in the resonant cavity after entering the laser cavity, so that the emission power of the laser is decreased, the change of the emission power of the laser characterizes the profile of the measured object, a computer 9 utilizes a data acquisition card to acquire the voltage signals outputted by a photoelectric detector, and stores the voltage signals as a data file, and in combination with position data, processing software is used for processing three-dimensional scanning measurement data, so that the three-dimensional structure of the measured object can be reconstructed. The structure of the system is simple, the equipment cost can be remarkably reduced, and the system is highly practical.
Description
technical field [0001] The invention relates to a measuring instrument, in particular to a three-dimensional shape microscopic measurement system based on laser feedback effect. Background technique [0002] In the three-dimensional shape measurement of objects, there are many methods such as laser triangulation method, structured light method, inductance profiler method, laser confocal scanning microscope method and so on. Among them, the laser confocal scanning microscope measurement method is a three-dimensional high-resolution measurement method. The laser confocal scanning microscope uses a laser point light source to replace the field light source of the traditional optical microscope. The structure adopts a double pinhole structure to form a unique design of object-image conjugation. The point light source scans the sample point by point on the focal plane of the objective lens, and forms an image at the conjugate pinhole on the detector side. Due to the conjugate r...
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IPC IPC(8): G01B11/24
Inventor 马军山凌进中李晓沛
Owner UNIV OF SHANGHAI FOR SCI & TECH