Carbon nanotube-silicon film laminated solar battery and preparation method thereof
A technology of carbon nanotube thin film and solar cell, which is applied in nanotechnology, nanotechnology, nanotechnology for information processing, etc., can solve the problems of impractical application and low performance, and achieve the advantages of charge transfer and high conductivity Sexuality and broad application prospects
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Embodiment 1
[0034] Example 1, Preparation and performance testing of carbon nanotube-silicon thin film stacked solar cells
[0035] 1) Evaporate a layer of 200nm thick indium tin oxide transparent conductive film on the glass substrate, and lead it out with a wire;
[0036] 2) sequentially depositing a 50nm thick N-type amorphous silicon layer, a 500nm thick I-type amorphous silicon layer and a 50nm thick P-type amorphous silicon layer on the transparent conductive film by plasma enhanced chemical vapor deposition;
[0037] 3) spreading a single-walled carbon nanotube film with a thickness of 200nm on the P-type amorphous silicon layer, and making the carbon nanotube film closely contact with the silicon film;
[0038] 4) An aluminum electrode with a thickness of 20nm is vapor-deposited on the carbon nanotube film, and drawn out with a wire to obtain a carbon nanotube-silicon film laminated solar cell.
[0039] Performance Testing:
[0040] Under standard light source (AM1.5, 100mW / cm ...
Embodiment 2
[0041] Example 2, Preparation and performance testing of carbon nanotube-silicon thin film stacked solar cells
[0042] 1) Evaporate a layer of 100nm thick indium tin oxide transparent conductive film on the glass substrate;
[0043] 2) sequentially depositing a 500nm thick N-type silicon thin film layer, a 10nm thick I-type silicon thin film layer and a 1500nm thick P-type silicon thin film layer on the transparent conductive film by plasma enhanced chemical vapor deposition;
[0044] 3) transferring the single-walled carbon nanotube film with a thickness of 200nm to the p-type silicon layer;
[0045] 4) An aluminum electrode with a thickness of 20nm is vapor-deposited on the carbon nanotube film, and drawn out with a wire to obtain a carbon nanotube-silicon film laminated solar cell.
[0046] 5) Detection and analysis under scanning electron microscope
[0047] See attached Figure 5
[0048] Performance Testing:
[0049] Under standard light source (AM1.5, 100mW / cm 2 ...
Embodiment 3
[0050] Example 3, Preparation and performance testing of carbon nanotube-silicon thin film stacked solar cells
[0051] 1) Evaporate a layer of 200nm thick indium tin oxide transparent conductive film on the glass substrate, and lead it out with a wire;
[0052] 2) On the transparent conductive film, a 100nm thick N-type amorphous silicon layer, an 800nm thick I-type amorphous silicon layer, a 100nm thick P-type amorphous silicon layer and a 50nm thick N-type amorphous silicon layer were sequentially deposited by plasma-enhanced chemical vapor deposition layer;
[0053] 3) spreading a single-walled carbon nanotube film with a thickness of 300nm on the N-type amorphous silicon layer, and making the carbon nanotube film closely contact with the silicon film;
[0054] 4) Evaporating aluminum electrodes with a thickness of 50 nm on the carbon nanotube film and leading them out with wires to obtain a carbon nanotube-silicon film stacked solar cell.
[0055] Performance Testing:...
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