Planar oxygen sensor and method for producing same
An oxygen sensor and oxygen sensing technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of unstable output voltage signal of oxygen sensor and low yield of oxygen sensor, and achieve stable air pressure, not easy to deform, and improve the combination of area effect
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[0019] The present invention also provides a method for preparing a chip oxygen sensor, which includes cutting through holes on the reference gas layer, and then superimposing the heating layer, the reference gas layer and the sensing layer in the order from bottom to top, and hot pressing And sintering to form a closed reference cavity at the through hole to obtain the chip oxygen sensor.
[0020] Specifically, it includes the following steps:
[0021] 1) Take a heater substrate, sequentially print insulating layer paste, electrode paste, and insulating layer paste on the heater substrate, and dry, to form an insulating layer on the heater substrate to obtain a heating layer;
[0022] 2) The electrode paste is printed on both sides of the zirconia sensitive substrate and dried to form electrodes on both sides of the zirconia sensitive substrate; then a porous protective layer is printed on the electrode on one side and dried to form a porous protective layer on the surface 的sensing ...
Embodiment 1
[0032] (1) Raw material preparation:
[0033] Insulation layer slurry: 75 parts by weight of aluminum oxide, 3 parts by weight of silicon oxide, 5 parts by weight of magnesium oxide, 15 parts by weight of terpineol, and 2 parts by weight of ethyl cellulose.
[0034] Electrode slurry: 81 parts by weight of Pt powder, 2 parts by weight of alumina, 2 parts by weight of zirconia, 10 parts by weight of terpineol, and 5 parts by weight of ethyl cellulose.
[0035] Porous protective layer slurry: 54 parts by weight of magnesium aluminum spinel, 30 parts by weight of alumina, 8 parts by weight of terpineol, 2 parts by weight of ethyl cellulose, and 6 parts by weight of pore former.
[0036] (2) The insulating layer paste, electrode paste, and insulating layer paste are sequentially printed on the zirconia cast sheet, and dried to obtain a heating layer.
[0037] (3) Cut through holes on the zirconia cast sheet, the area of the through holes accounts for 8% of the total area of the reference...
Embodiment 2
[0041] The chip oxygen sensor chip S2 of this embodiment is prepared by the same method as in embodiment 1, except that:
[0042] In step (3), the area of the through hole accounts for 5% of the total area of the reference gas layer.
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