Graphene-based strain measuring and motion sensing device and manufacturing method thereof

A technology of motion sensing and strain measurement, applied in measuring devices, electromagnetic measuring devices, electric/magnetic solid deformation measurement, etc., can solve the problems of fatigue aging, poor mechanical properties, etc., and achieve small influence, stable structure, and preparation method simple effect

Inactive Publication Date: 2012-06-20
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Conductive polymer strain measurement, substrates or fabrics with conductive polymer coa...

Method used

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  • Graphene-based strain measuring and motion sensing device and manufacturing method thereof
  • Graphene-based strain measuring and motion sensing device and manufacturing method thereof
  • Graphene-based strain measuring and motion sensing device and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] In the first step, make as Figure 1A Graphene strain measurement device

[0051]1. Vapor-phase chemical deposition of graphene: use 25 micron thick copper foil as the substrate, cut the copper foil into 0.5cm*10cm strips, maintain the growth temperature at 1000°C, feed methane and hydrogen, the gas flow rate is 25sccm methane, 10sccm hydrogen, After growing for 15 minutes, turn off the methane, and quickly cool to room temperature under the protection of 10 sccm hydrogen gas flow, and obtain a graphene material with 1-2 layers on the copper.

[0052] 2. Transfer graphene to polydimethylsiloxane (PDMS) flexible substrate: suspend the surface of the copper sheet covered with graphene with PDMS solution, and soak the copper sheet in 0.1M ferric chloride solution after the solvent evaporates , after 24 hours, the copper was completely dissolved, resulting in a graphene-PDMS layer floating on the solution.

[0053] 3. Coat the two ends of the long side of the graphen...

Embodiment 2

[0060] Graphene is prepared according to the method of implementation example 1.

[0061] The substrate uses polymethyl methacrylate (PMMA) instead of PDMS to transfer the graphene off the copper and transfer it to a polyethylene terephthalate (PET) plastic substrate: the graphene-covered Coat the surface of the copper sheet with PMMA solution. After the solvent volatilizes, place the copper sheet in 0.1M ferric chloride solution and soak it. After 24 hours, the copper is completely dissolved, and a graphene-PMMA tape floating on the solution is obtained; attach the tape On the pre-made strip-shaped PET substrate, then wash off the PMMA with acetone to obtain graphene attached to the PET substrate.

[0062] Magnetron ion sputtering gold electrodes (5nm titanium / 30nm gold) were used at both ends of the graphene long side, and wires were drawn out. The electrodes at both ends of the graphene are encapsulated and protected with sealing silica gel.

[0063] Connect the PET base ...

Embodiment 3

[0066] made as Figure 1B The graphene strain measurement device, the steps are as follows

[0067] 1. Graphene is vapor-phase chemically deposited as in Example 1, except that 0.5cm*10cm and 0.3*3cm copper foils are used as growth substrates.

[0068] 2. Transfer graphene to PET flexible substrate. Suspend the surface of the copper sheet covered with graphene with PMMA solution. After the solvent evaporates, place the copper sheet in 0.1M ferric chloride solution and soak it. After 24 hours, the copper is completely dissolved and the graphene-PMMA strips floating on the solution are obtained. , the four graphene-PMMA ribbons according to Figure 1B The form was transferred to a PET substrate, washed to remove PMMA.

[0069] 3. Coat the two ends of the long side of the graphene with conductive silver glue, lead out the wires, and dry and solidify.

[0070] 4. Seal the silver electrodes at both ends of the graphene with sealing silica gel.

[0071] Attaching the device to ...

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Abstract

The invention discloses a graphene-based strain measuring or motion sensing device. The device is formed by the following steps: a layer or a plurality of layers of graphene film layers are combined on a flexibly insulating substrate; two ends of the graphene film layer are led out through electrodes and connected with ohmmeters, wherein the device is closely combined on the surface of an object to be detected, or a plurality of the devices are closely combined on the surface of the object to be detected, so that the strain variation measurement or motion monitoring can be realized. The device disclosed by the invention has the advantages of simple manufacturing method and capabilities of being suitable for large-scale production such as surface mounting and the like, and being applied to various types of environments and deformed surfaces; especially, the influence on the object to be detected is small, so that contactless measurement can be realized, and the device is suitable for monitoring biological motion. The invention further discloses a manufacturing method and a measuring method for the device.

Description

technical field [0001] The invention relates to a graphene-based strain measurement and motion sensing device and a manufacturing method thereof. Background technique [0002] Graphene has high mechanical strength, excellent electrical transport properties, and good resistance to chemical environments. As the thinnest material, it can be stably adhered to various surfaces and change shape as the surface changes. In particular, previous studies have found that when graphene is stretched or compressed, its resistance will change significantly, and the change shows a good linear relationship within a certain range. [0003] Existing strain sensing and measurement methods fall into the following categories: [0004] Metal strain gauges usually use metal foil or metal wire as the measurement sensitive unit, and the specially designed or processed metal foil is used as the strain sensing unit to measure strain through resistance changes, such as Chinese patents 200710096310.8, 20...

Claims

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Application Information

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IPC IPC(8): G01B7/16G01B7/00G01P13/00
Inventor 周建新郭万林殷俊陈亚清
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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