Ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements

Abstract

An ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements comprises an ultraviolet ozone generating module, an air-conditioning module, a gas managing module and an intelligent unit. The ultraviolet ozone generating module cleans the vacuum ultraviolet optical elements; the air-conditioning module controls the temperature and the humidity in the drying cabinet in a vacuum ultraviolet optical element cleaning / storing process; the gas managing module manages gas in the drying cabinet in the vacuum ultraviolet optical element cleaning and storing process; and the intelligent unit controls the total vacuum ultraviolet optical element cleaning / storing process. Hydrocarbon pollutants on the vacuum ultraviolet optical elements can be removed fast, adverse effects to optical performances of the vacuum ultraviolet optical elements due to water vapor are stopped, the problem that the performances of the vacuum ultraviolet optical elements are degraded due to an improper storage mode is effectively avoided, and the ultraviolet ozone drying cabinet is particularly applicable to cleaning and storing the vacuum ultraviolet optical elements.

Description

technical field [0001] The invention relates to an optical element sample cabinet, in particular to an ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements. Background technique [0002] With the continuous development of laser technology, vacuum ultraviolet laser sources represented by excimer lasers, free electron lasers and all-solid-state vacuum ultraviolet lasers have emerged one after another. These vacuum ultraviolet laser sources have very broad application prospects in the fields of microelectronic device manufacturing, micromachining, nanomaterial processing and biomedical engineering. The rapid development of vacuum ultraviolet laser light sources and its wide application have put forward an urgent demand for high-performance vacuum ultraviolet optical components. [0003] Usually, the vacuum ultraviolet band all-dielectric optical film prepared by the physical vapor deposition process has a lower aggregation density than ...

AI Technical Summary

Problems solved by technology

At present, more ultraviolet lamps are used to clean vacuum ultraviolet optical components, and only the ultraviolet ozone cleaning function is used. Although it can effectively avoid the pollution of hydrocarbons to vacuum ultraviolet optical components, it cannot reduce or eliminate water vapor and large temperature fluctuations. The impact on the performance of vacuum ultraviolet optical components makes it difficult to achieve long-term stable storage of vacuum ultraviolet optical components

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