Method for forming cadmium tin oxide layer and a photovoltaic device
A cadmium tin oxide, transparent layer technology, applied in photovoltaic power generation, semiconductor devices, semiconductor/solid-state device manufacturing, etc., can solve problems such as difficult assembly and disassembly, misalignment of CTO film sublimation, and increased manufacturing cost of CdS
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
example 1
[0098] Example 1 Rapid thermal annealing of a CTO layer disposed on borosilicate glass
[0099] Cadmium tin oxide (CTO) thin films were prepared on borosilicate glass supports by room temperature DC sputtering using a ceramic target and a sputtering pressure of 16.5 mTorr. The borosilicate glass support has a thickness of approximately 1.3 mm. The rapid thermal annealing (RTA) process was performed in an argon atmosphere (-700 Torr) and no additional source of cadmium was used (to compensate for Cd loss from the film during thermal annealing). Several 0.5 inch x 1 inch samples were cut from 6 inch x 6 inch plates, resulting in ~216 nm thick amorphous CTO films on borosilicate glass. These samples were placed in sealed quartz tubes filled with argon and introduced into a custom designed rapid annealing system based on a single 2 kilowatt halogen lamp. The halogen lamp was pulsed and a fixed pulse width of 30 seconds was used. Vary the power of the lights to explore the area ...
example 2
[0105] Example 2 Rapid thermal annealing of a CTO layer on soda lime glass
[0106] Three films of CTO were prepared on soda lime glass supports by room temperature DC sputtering using a ceramic target and a sputtering pressure of 16 mTorr. The soda lime glass support has a thickness of approximately 3.2 mm. CTO films on soda lime glass supports were subjected to RTA using the method as described above in Example 1. However, for the CTO film provided on the soda lime glass support, the rapid thermal annealing treatment was repeated 3 to 4 times using a pulse width of 30 seconds for each cycle. The total duration of the annealing step is about 2 minutes.
[0107] Figure 17 shows the progression towards increased optical clarity with each successive annealing cycle. The slower annealing rate of the CTO film on soda-lime glass may be due to the thicker soda-lime glass support (3.2 mm), which causes a different heat distribution to occur (when compared to the thinner (1.3 mm) b...
PUM
| Property | Measurement | Unit |
|---|---|---|
| wavelength | aaaaa | aaaaa |
| wavelength | aaaaa | aaaaa |
| wavelength | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 