Method for manufacturing optical fiber probe by using focused ion beam technology

Abstract

The invention relates to a method for manufacturing an optical fiber probe by using the focused ion beam technology, which includes the following steps: preprocessing an original optical fiber; fixing the preprocessed optical fiber on a sample platform of a focused ion beam system, adjusting the direction of the sample platform, enabling the ion beam exit direction of the focused ion beam system to be perpendicular to the central axis of the optical fiber, and starting the focused ion beam system to mill the end face of the optical fiber so as to enable the end face of the optical fiber to be smooth; adjusting the direction of the sample platform, enabling the ion beam exit direction to be perpendicular to the tail end face of the optical fiber, and enabling a circular grey-scale map to be converted into a bitmap (bmp) file which is input into a pattern generator of the focused ion beam system through a computer to mill the cylindrical surface of the tail end of the optical fiber layer by layer; changing processing parameters of the focused ion beam system, enabling the focused ion beam system to be in fine milling state, and converting a taper-angle grey-scale map into a bmp file which is input into the pattern generator of the focused ion beam system through a computer to mill the end face of the optical fiber to obtain the required optical fiber probe. The method for manufacturing the optical fiber probe by using the focused ion beam technology can be widely applied to manufacturing of optical fiber probes.

Description

Technical field [0001] The invention relates to a method for preparing an optical fiber probe, in particular to a method for preparing an optical fiber probe by using focused ion beam technology. Background technique [0002] The fiber probe is the core component of the near-field optical microscope (SNOM), which plays an important role in the observation of the topography of objects and the study of optical properties on the nano-scale and micro-scale. At present, optical fiber probes are not only the core components in SNOM, but also can be made into multifunctional miniature sensors, or used in combination with spectrometers to detect samples with high sensitivity and high resolution. They are used in cell biology, chemistry and spectroscopy. Both have a wide range of application prospects, therefore, the preparation of an ideal optical fiber probe has important practical significance. [0003] At present, the commonly used methods for preparing optical fiber probes include fus...

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Problems solved by technology

[0003] At present, the methods commonly used to prepare fiber optic probes include melting drawing method, corrosion method, tube corrosion method, laser ablation method, etc., but it is difficult to obtain a fiber optic probe with a larger cone angle by using the melting drawing method; corrosion method and tube corrosion method can make The tapered transition area of ​​the fiber probe is short, the loss is small, and the cone angle is large, but when the fiber probe with a larger cone angle is prepared, the surface will become rough, and the corrosion method has higher requirements for the stability of the environment and the corrosion solution. High; laser ablation and corrosion methods are easier to obtain probes with smooth surfaces and larger cone angles than corrosion and tube corrosion methods, but it is difficult for all of the above methods to obtain fiber optic probes with tip diameters less than 50nm

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