Super junction device with multiple embedded P islands and N channels and preparation method thereof
A superjunction device and channel technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problem of uneven electric field distribution in the drift region, and achieve the effect of solving uneven electric field distribution
Active Publication Date: 2012-07-18
7 Cites 5 Cited by
AI-Extracted Technical Summary
Problems solved by technology
The invention provides a super junction device with multiple embedded P islands and N channels and a preparation method thereof. The super junction device comprises a semiconductor substrate, an N-type drift region formed on the semiconductor substrate, P-type body regions on one side of the N-type drift region, and N-type leakage regions on the other side of the N-type drift region, wherein a plurality of parallel island-shaped P areas are formed in the N-type drift region at intervals, and each island-shaped P area is gradually diminished in a linear manner from N-type source regions to the N-type leakage regions; the function of the substrate-assisted depletion effect is sequentially enhanced from source ends to leakage ends under a high voltage, so that the island-shaped P areas are correspondingly decreased from the source ends to the leakage ends, and accordingly, the complementation and offset to the substrate-assisted depletion effect are realized, and the purpose of charge balance is achieved.
Semiconductor/solid-state device manufacturingSemiconductor devices
Body regionN channel +4
- Experimental program(3)
Description & Claims & Application Information
We can also present the details of the Description, Claims and Application information to help users get a comprehensive understanding of the technical details of the patent, such as background art, summary of invention, brief description of drawings, description of embodiments, and other original content. On the other hand, users can also determine the specific scope of protection of the technology through the list of claims; as well as understand the changes in the life cycle of the technology with the presentation of the patent timeline. Login to view more.