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Method for manufacturing contactless conductivity detection microchip of integrated thickness controllable insulation layer

A technology of non-contact conductance and manufacturing method, which is applied in the fields of medicine, life science, microfluidic chip, and analytical chemistry, and can solve the problem of uncontrollable thickness of the insulating layer, and achieve the effect of low cost, simple manufacturing process, and precise thickness control

Active Publication Date: 2014-04-23
DALIAN UNIV OF TECH
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Problems solved by technology

[0003] The invention overcomes the problem that the thickness of the insulating layer on the existing chip is uncontrollable, and provides a simple method for manufacturing a non-contact conductance detection microfluidic chip with controllable thickness of the insulating layer

Method used

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  • Method for manufacturing contactless conductivity detection microchip of integrated thickness controllable insulation layer
  • Method for manufacturing contactless conductivity detection microchip of integrated thickness controllable insulation layer
  • Method for manufacturing contactless conductivity detection microchip of integrated thickness controllable insulation layer

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Embodiment 1

[0020] as attached figure 1 shown in German The model of Delta 80RC produced by MicroTec Co., Ltd. spin-coats a layer of positive photoresist produced by Beijing Kehua Microelectronics Materials Co., Ltd. on the surface of the glass slide. Low speed 550rpm, time 9 seconds; high speed 2200rpm, time 30 seconds, and pre-baked on a hot plate at 55°C for 1 hour, and then covered the mask on the photoresist, using German The model produced by MicroTec Company is the UV lithography machine of MA / BA6, which exposes the photoresist for 40 seconds, puts it into the developing solution and develops it, and then obtains a photoresist pattern with a width of micron ( figure 1 -④), then put it on a hot plate at 55 ℃ and bake for 20 minutes; then put it into the magnetron sputtering station of LAB.18 produced by Kunt J.Lesker Company to sputter the platinum film, because platinum and The bonding force of glass is not good, so we first sputter a layer of Ti, about 30nm, and then sputter 9...

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Abstract

A method for manufacturing a contactless conductivity detection microchip of an integrated thickness controllable insulation layer belongs to the technical field of microfluidic chip manufacturing and includes: firstly, a detection electrode for contactless conductivity detection is manufactured on a glass substrate, a metal wire is fixed on a pad of the detection electrode, mixture of polydimethylsiloxane (PDMS) and methylbenzene is evenly coated on the glass substrate by a spin coater to form a layer of PDMS insulation layer, the thickness of the PDMS insulation layer can be accurately controlled by adjusting volume proportion of the PDMS and methylbenzene and the revolution number of the spin coater, and the manufacture of the whole microchip is finished by bonding a piece of PDMS with a micro channel on the upper surface of the PDMS insulation layer. The method is simple in process and low in cost and achieves accurate control in thickness of the PDMS insulation layer on the microfluidic chip, and the thickness can be as thin as 0.6 mu m.

Description

technical field [0001] The invention belongs to the technical field of microfluidic chips, and relates to a manufacturing method of a microfluidic chip using non-contact conductance detection, which is applied in the fields of life science, medicine, analytical chemistry and the like. Background technique [0002] Microfluidic chip technology is one of the rapidly developing frontier fields of high-tech and interdisciplinary science and technology. It is an important technology platform for the development of life science, chemical science and information science in the future. The advantages of microfluidic chips in miniaturization, integration and portability provide a great opportunity for their applications in many fields such as biomedicine, drug synthesis and screening, environmental monitoring and protection, health and quarantine, judicial identification, and detection of biological warfare agents. Very broad prospects. The detection of microfluidic chips has variou...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01L3/00
Inventor 刘军山徐飞刘冲徐征杜立群王立鼎
Owner DALIAN UNIV OF TECH