Array substrate, array substrate preparation method and display device

A technology for array substrates and substrates, applied in semiconductor/solid-state device manufacturing, optics, instruments, etc., can solve the problems of reducing the cost and complexity of graphene film patterning process, and improve product competitiveness, reduce costs, and chemical stability. high effect

Active Publication Date: 2012-09-05
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The further technical problem to be solved in the present invention is how to reduce the cost and complexity of the graphene film patterning process

Method used

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  • Array substrate, array substrate preparation method and display device
  • Array substrate, array substrate preparation method and display device
  • Array substrate, array substrate preparation method and display device

Examples

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Embodiment 1

[0045] The array substrate includes a substrate having a plurality of pixel regions. In this embodiment, one of the pixel regions is taken as an example to introduce the structure of the array substrate. The following is an introduction by taking the structure of an existing conventional thin film transistor as an example, such as figure 1 As shown, the present invention is not limited to improving the array substrate with this structure, and it is only taken as an example for the convenience of description.

[0046] figure 1 A schematic diagram showing a pixel structure of a pixel region of the array substrate of this embodiment, figure 2 yes figure 1 A-A' cross section in . As shown in the figure, a thin film transistor and a pixel electrode are formed in a pixel area. Specifically, a gate 1 and a common electrode 2 are formed on the substrate 100, a gate insulating layer 3 is continuously covered above the gate 1 and the common electrode 2, and a semiconductor layer is...

Embodiment 2

[0050] The structure of the liquid crystal display array substrate of this embodiment is the same as that of the array substrate of Embodiment 1, the difference being that the source electrode 6 and the drain electrode 7 of this embodiment are also made of graphene. Because the source electrode 6, the drain electrode 7 and the pixel electrode 8 belong to the same level in the preparation process, and the drain electrode 7 and the pixel electrode 8 are conductively connected, the preparation of the source electrode 6, the drain electrode 7 and the pixel electrode 8 is made of graphene. The process is simpler and the cost is lower. The setting of the etching stopper layer 5 in this embodiment can protect the active layer 4 from corrosion damage caused by the preparation of the source electrode 6 , the drain electrode 7 and the pixel electrode 8 .

Embodiment 3

[0052] The structure of the liquid crystal display array substrate of this embodiment is the same as that of the array substrate of Embodiment 1, the difference being that the source electrode 6 and the drain electrode 7 of this embodiment are made of graphene. Because the source electrode 6 and the drain electrode 7 belong to the same level in the preparation process, the preparation process is simple, and the source electrode 6 and the drain electrode 7 made of graphene have high chemical stability, good flexibility, and are not prone to ion diffusion. Damage, applicable to a variety of substrates, such as flexible substrates.

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Abstract

The invention relates to display technologies and discloses an array substrate. In a pixel structure of the array substrate, a leakage electrode is connected with a pixel electrode in electrical conductivity, and the pixel electrode, or a source electrode and the leakage electrode, or the pixel electrode, the source electrode and the leakage electrode are made from graphene. The invention also discloses an array substrate preparation method, and specifically, patterning graphene films are prepared from a graphene oxide solution. According to the array substrate, the electrodes prepared from the graphene films are high in chemical stability, good in flexibility and not easy to be subjected to ion diffusion, the cost can be reduced substantially, and the product competiveness is improved; according to the array substrate reparation method, the electrodes made from the graphene do not damage substrates, thus being suitable for various substrates such as flexible substrates; in addition, the whole technological operation is simple, the capitalized cost on equipment is reduced as expensive equipment is not needed, the large-area graphene films can be prepared, and the array substrate can be used in a large scale.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an array substrate, a method for preparing the array substrate and a display device. Background technique [0002] In recent years, the display technology has developed rapidly, and the flat panel display is very different from the traditional video image display with its completely different display and manufacturing technology. Thin Film Transistor Liquid Crystal Display (TFT-LCD) has the characteristics of small size, low power consumption, and no radiation, and occupies a dominant position in the current flat panel display market. At present, four masking processes are used to prepare the array substrate in the flat panel display: (1) forming the gate metal; (2) forming the gate insulating layer, active layer, source and drain; (3) forming the passivation layer and a passivation layer via hole; (4) forming a pixel electrode and connecting it to the drain through the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/02H01L21/77
CPCG02F1/13439G02F1/1362B82Y20/00G02F1/136286H01L29/458H01L27/124H01L29/45H01L29/786H01L21/288H01L29/66742
Inventor 张锋戴天明姚琪
Owner BOE TECH GRP CO LTD
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