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Array substrate, array substrate preparation method and display device

A technology for array substrates and substrates, applied in semiconductor/solid-state device manufacturing, optics, instruments, etc., can solve the problems of reducing the cost and complexity of the graphene film patterning process, so as to improve product competitiveness, reduce equipment investment costs, reduce The effect of the process steps

Active Publication Date: 2013-06-12
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The further technical problem to be solved in the present invention is how to reduce the cost and complexity of the graphene film patterning process

Method used

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  • Array substrate, array substrate preparation method and display device
  • Array substrate, array substrate preparation method and display device
  • Array substrate, array substrate preparation method and display device

Examples

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Embodiment 1

[0045] The array substrate includes a substrate having a plurality of pixel regions. In this embodiment, one of the pixel regions is taken as an example to introduce the structure of the array substrate. The following is an introduction by taking the structure of an existing conventional thin film transistor as an example, such as figure 1 As shown, the present invention is not limited to improving the array substrate with this structure, and it is only taken as an example for the convenience of description.

[0046] figure 1 A schematic diagram showing a pixel structure of a pixel region of the array substrate of this embodiment, figure 2 yes figure 1 A-A' cross section in . As shown in the figure, a thin film transistor and a pixel electrode are formed in a pixel area. Specifically, a gate 1 and a common electrode 2 are formed on the substrate 100, a gate insulating layer 3 is continuously covered above the gate 1 and the common electrode 2, and a semiconductor layer is...

Embodiment 2

[0050] The structure of the liquid crystal display array substrate of this embodiment is the same as that of the array substrate of Embodiment 1, the difference being that the source electrode 6 and the drain electrode 7 of this embodiment are also made of graphene. Because the source electrode 6, the drain electrode 7 and the pixel electrode 8 belong to the same level in the preparation process, and the drain electrode 7 and the pixel electrode 8 are conductively connected, the preparation of the source electrode 6, the drain electrode 7 and the pixel electrode 8 is made of graphene. The process is simpler and the cost is lower. The setting of the etching stopper layer 5 in this embodiment can protect the active layer 4 from corrosion damage caused by the preparation of the source electrode 6 , the drain electrode 7 and the pixel electrode 8 .

Embodiment 3

[0052] The structure of the liquid crystal display array substrate of this embodiment is the same as that of the array substrate of Embodiment 1, the difference being that the source electrode 6 and the drain electrode 7 of this embodiment are made of graphene. Because the source electrode 6 and the drain electrode 7 belong to the same level in the preparation process, the preparation process is simple, and the source electrode 6 and the drain electrode 7 made of graphene have high chemical stability, good flexibility, and are not prone to ion diffusion. Damage, applicable to a variety of substrates, such as flexible substrates.

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Abstract

Embodiments of the invention provide an array substrate, a method for manufacturing the same and a display device. The array substrate comprises a thin film transistor and a pixel electrode electrically connected to a drain electrode of the thin film transistor. The pixel electrode is formed of graphene, or a source electrode and the drain electrode of the thin film transistor are formed of graphene, or the pixel electrode, the source and drain electrodes of the thin film transistor are all formed of graphene.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an array substrate, a method for preparing the array substrate and a display device. Background technique [0002] In recent years, the display technology has developed rapidly, and the flat panel display is very different from the traditional video image display with its completely different display and manufacturing technology. Thin Film Transistor Liquid Crystal Display (TFT-LCD) has the characteristics of small size, low power consumption, and no radiation, and occupies a dominant position in the current flat panel display market. At present, four masking processes are used to prepare the array substrate in the flat panel display: (1) forming the gate metal; (2) forming the gate insulating layer, active layer, source and drain; (3) forming the passivation layer and a passivation layer via hole; (4) forming a pixel electrode and connecting it to the drain through the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/02H01L21/77
CPCH01L21/288B82Y20/00H01L29/786G02F1/136286H01L21/77G02F1/13439G02F1/1362H01L29/458H01L29/66742H01L29/45G02F1/1368H01L27/124
Inventor 张锋戴天明姚琪
Owner BOE TECH GRP CO LTD
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