Six-degree-of-freedom magnetic suspension micro-positioner

Abstract

The invention relates to a six-degree-of-freedom magnetic suspension micro-positioner, which comprises two-degree-of-freedom electromagnetic driving units arranged on a mover substrate of the micro-positioner and used for driving the micro-positioner to realize movement of six degrees of freedom, i.e., X, Y, Z, thetax, thetay and thetaz. Each two-degree-of-freedom electromagnetic driving unit comprises a bonding permanent magnet, a vertical winding coil and a horizontal winding coil, wherein the bonding permanent magnet is formed by bonding three permanent magnets of which the magnetization directions are different, and is fixed at the bottom of a square tray; the vertical coil is used for providing vertical force; the horizontal winding coil is used for providing horizontal force; and the vertical winding coil and the horizontal winding coil are fixed on a stator. A coil part of the micro-positioner has high magnetic flux density, and a magnetic induction line direction, a current direction and a target thrust force direction are orthogonal to each other, so that large thrust force is obtained under unit current; electromagnetic force is directly used for driving, so that mechanical friction is avoided, and high displacement resolution is achieved; and moreover, the micro-positioner is simple and compact in structure, is easy to install and debug, and can be used for realizing ultra-precise processing and semiconductor manufacturing of nano-grade positioning in a micron stroke.

Description

technical field [0001] The invention belongs to the fields of ultra-precision processing and semiconductor manufacturing, and in particular relates to a six-degree-of-freedom magnetic suspension micro-motion stage. Background technique [0002] High-precision, high-response micro-motion stage is one of the core components of ultra-precision machining and semiconductor manufacturing equipment, and plays an extremely important role in modern manufacturing technology. In the ultra-precision machining machine tool, the ultra-precision micro-motion stage is used to compensate the error of the feed system to achieve precise positioning; In addition, ultra-precision micro-motion stages are also widely used in MEMS system processing, packaging and assembly, optical fiber docking, and atomic force microscopy and other fields. [0003] Since most of the kinematic mechanisms of ultra-precision machining equipment currently adopt a coarse-fine laminated structure, the micro-motion stag...

AI Technical Summary

Problems solved by technology

Due to the influence of factors such as frictional damping nonlinearity in the first two types of micro-motion stages, the positioning accuracy and application range are limited.

The third type of micro-motion table usually uses a single-degree-of-freedom drive unit, which makes the structure complex and the mass of the mover is large when realizing multi-degree-of-freedom motion positioning; currently, a micro-motion table with a multi-degree-of-freedom drive unit is used, such as Professor Kim of TAMU. Both the Y-type micro-motion table and the optical disk micro-motion table of Professor Meng Jiaxiang of OSU have problems such as low magnetic field utilization and high heat generation.

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