Coating device for researching vacuum spraying characteristics

Abstract

The invention relates to a coating device for researching vacuum spraying characteristics. The front end of a vacuum spraying chamber composed of a quartz glass tube is connected with a vacuum door provided with a compound vacuum gauge and various lead flanges, and the rear end of the vacuum spraying chamber is connected with an air extraction device by virtue of an air release valve CF (conflat) flange; two atomizing nozzles adopt two-fluid-induction-charging pneumatic-type nozzles, and a nozzle flapper provided with a lifting device is arranged in front of each atomizing nozzle; a fluid delivery device and a high-pressure nitrogen delivery device which are composed of four beakers and two HPLC (high performance liquid chromatography) pumps are arranged in two paths to be respectively connected with each atomizing nozzles; an external electromagnet is used for controlling the operations of moving, taking out and putting in a substrate in the spraying chamber; an infrared heating tube and a silicon rubber heater are used for heating; and a testing device is composed of a transmitting light source, a CCD (charge coupled discharge) high-speed camera, a PC (personal computer) machine and a temperature detection device. The coating device disclosed by the invention has a simple structure, is easy to operate, good in intuitiveness and low in cost, and can be used for performing tests and comprehensive research on the various characteristics of vacuum spraying and also for preparing a multi-substrate polymer function gradient film and laminated film in different concentration ratios.

Description

technical field [0001] The invention relates to a vacuum atomization injection device, in particular to a coating device used for the research of vacuum spray characteristics. Background technique [0002] Nano-films, especially polymer-organic nanocomposite films, as a new type of polymer material film, are widely used in the fields of polymer solar cells, electroluminescent devices, thin-film transistors and other optoelectronic devices due to their light weight, good flexibility and easy processing. Has a wide range of applications. Traditional coating processes such as evaporation and sputtering are difficult to prepare high-molecular polymer organic thin films due to problems such as high-temperature thermal ablation and chemical decomposition. Many nanotechnological processes are associated with liquid phase materials as interdisciplinary technical fields are increasingly cooperating. Solution-based thin film preparation methods mainly include spin coating method, in...

AI Technical Summary

Problems solved by technology

Even if some vacuum injection devices are used to study the film morphology, structure and photoelectric characteristics, the test instruments used are difficult to be popularized due to the shortcomings of complex structure and high investment cost.

In addition, with the rapid development of thin film technology, functionally graded thin films and laminated films have attracted much attention due to their composition and structural compatibility, but their preparation methods are mostly physical vapor deposition (PVD) and chemical vapor deposition ( CVD) method, these two methods are difficult to prepare ideal functionally graded thin films and laminated films due to the phenomenon of high temperature diffusion, and report on specific methods and devices for preparing functionally graded thin films and laminated films by vacuum jet deposition also rarely

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