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Thin film solar cell based on patterned metal substrate and manufacturing method thereof

A technology of thin-film solar cells and metal substrates, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problem of inability to manufacture thin-film solar cells at low cost, and achieve enhanced light absorption efficiency, improved light absorption efficiency, and low cost. Effect

Active Publication Date: 2015-11-18
SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a thin-film solar cell based on a patterned metal substrate and its manufacturing method, which is used to solve the problem of enhancing the light absorption efficiency of the thin-film solar cell in the prior art, The problem of inability to manufacture thin-film solar cells with large area and low cost

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  • Thin film solar cell based on patterned metal substrate and manufacturing method thereof
  • Thin film solar cell based on patterned metal substrate and manufacturing method thereof
  • Thin film solar cell based on patterned metal substrate and manufacturing method thereof

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Effect test

Embodiment 1

[0069] Such as Figure 1a to Figure 2d As shown, the present invention provides a kind of fabrication method based on the patterned metal substrate thin-film solar cell, and described fabrication method comprises at least:

[0070] First perform step 1), such as Figures 1a to 1h As shown, a substrate 1 of a first metal material is provided, and a nanoscale pattern structure is produced on the surface of the metal substrate 1 by anodic oxidation or nanoimprinting to form a patterned metal substrate 1, wherein the The first metal material includes at least any one of titanium, aluminum, stainless steel, and copper, or an alloy of any of several.

[0071] The nanoscale graphic structure is a disordered or ordered nanoscale graphic structure with a characteristic size ranging from 10 to 1000 nm. As shown in Figure 1, the ordered nanoscale graphic structure at least includes a nanoscale periodic graphic structure, Among them, the nanoscale periodic pattern structure shown in Fig...

Embodiment 2

[0092] The second embodiment uses basically the same manufacturing steps as the first embodiment, the difference is that in the second embodiment, the cadmium telluride thin-film solar cell with a patterned (aluminum) metal substrate is used as an example to illustrate, the following mainly The contents that are different from those in the specific steps of the first embodiment are described.

[0093] Such as Figure 3a to Figure 3c As shown, the present invention provides a kind of fabrication method based on the patterned metal substrate thin-film solar cell, and described fabrication method comprises at least:

[0094] First, perform the step 1) similar to that of Embodiment 1, provide a substrate 1 of a first metal material, and use anodic oxidation or nanoimprinting on the surface of the metal substrate 1 to produce a nanoscale pattern structure to form a pattern Metal Substrate 1.

[0095] Specifically, in the second embodiment, such as Figure 3a As shown, the first ...

Embodiment 3

[0108] The third embodiment adopts basically the same manufacturing steps as the first embodiment, the difference is that in the third embodiment, a copper indium gallium selenide (CIGS) thin film solar cell with a patterned (aluminum) metal substrate is taken as an example. To elaborate, the following mainly elaborates the contents that are different from those in the specific steps of Embodiment 1.

[0109] Such as Figure 4a to Figure 4c As shown, the present invention provides a kind of fabrication method based on the patterned metal substrate thin-film solar cell, and described fabrication method comprises at least:

[0110] First, perform the step 1) similar to that of Embodiment 1, provide a substrate 1 of a first metal material, and use anodic oxidation or nanoimprinting on the surface of the metal substrate 1 to produce a nanoscale pattern structure to form a pattern Metal Substrate 1.

[0111] Specifically, in the third embodiment, such as Figure 4a As shown, the...

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Abstract

The invention provides a thin-film solar battery based on an imaged metal substrate and a manufacturing method of the battery. The imaged metal substrate of a first metal material is manufactured by adopting an anode oxidization method or a nano imprinting method which can produce in a large area at a low cost and an imaged metal thin film of a second metal material between the imaged metal substrate and a light absorption layer is additionally arranged. According to the invention, by utilizing diffusion to light of the imaged metal thin film and a surface plasmon effect of the imaged metal thin film, a light path of incidence photons in the light absorption layer is increased and a partial electric magnetic field is enhanced, so that the light can be sufficiently absorbed in the light absorption layer and the light absorption efficiency is enhanced; and therefore, the thickness of the light absorption layer is reduced, and the photon-generated carrier collection efficiency and the photoelectric conversion efficiency are improved. Meanwhile, the cost is accelerated to be reduced. The thin-film solar battery based on the imaged metal substrate and the manufacturing method of the battery have the advantages of simple process and easiness of realizing large-area and low-cost production application.

Description

technical field [0001] The invention belongs to the field of thin-film solar cells of semiconductor technology, and relates to a thin-film solar cell and a manufacturing method thereof, in particular to a thin-film solar cell based on a patterned metal substrate and a manufacturing method thereof. Background technique [0002] Thin-film solar cells are a kind of solar cells that use thin-film photovoltaic materials as the light-absorbing layer. They have the advantages of less material consumption, low manufacturing temperature, and short energy repayment cycle, and have attracted extensive attention from the industry and scientific research fields. According to the different materials of thin-film solar cells, it can be divided into silicon-based thin-film solar cells, cadmium telluride solar cells, copper-based compound solar cells, dye-sensitized solar cells, and organic solar cells. Compared with crystalline silicon solar cells, the light-absorbing layer of thin-film sol...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/20H01L31/0392H01L31/0376
CPCY02E10/50Y02P70/521Y02P70/50
Inventor 李东栋黄洪涛鲁林峰王会利徐璟方小红陈小源
Owner SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI
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