Tapered-waveguide-assisted cascade long-period waveguide grating sensor and preparation method thereof

A technology of long-period gratings and waveguide gratings, which is applied to optical waveguides, light guides, and optical devices to transmit sensing components and light guides. The effect of response speed

Inactive Publication Date: 2012-10-10
SHANGHAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The sensitivity of these structures is higher than that of general long-period waveguide grating sensors, and it can realize micro-measurement. The addition of photonic crystals requires a very p

Method used

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  • Tapered-waveguide-assisted cascade long-period waveguide grating sensor and preparation method thereof
  • Tapered-waveguide-assisted cascade long-period waveguide grating sensor and preparation method thereof
  • Tapered-waveguide-assisted cascade long-period waveguide grating sensor and preparation method thereof

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Experimental program
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Effect test

Embodiment 1

[0024] The cascaded long-period waveguide grating sensor assisted by tapered waveguide is a cascaded long-period grating based on tapered waveguide, see figure 1 Stereogram and figure 2 Top view, composed of three parts: the first long-period waveguide grating (1) is connected to the second long-period waveguide grating (3) through a tapered waveguide (2), and the core refractive index of the three parts is the same, and their The cladding refractive index is also the same.

[0025] For the first long-period waveguide grating (1) and the second long-period waveguide grating (3) of the above-mentioned cascaded long-period waveguide gratings assisted by tapered waveguides, see image 3 front view and Figure 4 Side view, etched from polymer waveguide with tapered waveguide, consisting of upper cladding (4), lower cladding (5), substrate (6), core (7) and.

Embodiment 2

[0027] The preparation method of the above-mentioned sensor is as follows: the above-mentioned cascaded long-period waveguide grating based on the tapered waveguide is etched from a polymer waveguide with a tapered waveguide, and first made on silicon-based silicon dioxide by ultraviolet lithography technology. The substrate transfers the tapered waveguide-assisted cascaded waveguide pattern to the photoresist, and then uses the reactive ion etching method to etch the tapered waveguide-assisted cascaded waveguide into a tapered waveguide-assisted cascaded long-period waveguide raster. Its specific process and process steps are as follows:

[0028] 1) Using plasma chemical vapor deposition to deposit a layer of silicon dioxide on the substrate silicon wafer as the lower cladding layer of the optical waveguide, thereby forming a silicon-based silicon dioxide substrate;

[0029] 2) Coat the photoresist uniformly on the surface of silicon-based silicon dioxide by spin coating met...

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Abstract

The invention provides a tapered-waveguide-assisted cascade long-period waveguide grating sensor and a preparation method thereof. The sensor is formed by connecting a first long-period waveguide grating with a second long-period waveguide grating through a tapered waveguide. The Mach-Zehnder effect of a cascade long-period waveguide grating is combined with the characteristic of strong evanescent field high sensibility of the tapered waveguide by the sensor, so that the sensor has the good characteristics of high sensibility and quick response. The sensor adopts the manufacturing processes of simple and mature ultraviolet photoetching method and reactive ion etching method. Compared with a composite device consisting of a long-period optical fiber grating and an optical fusible cone, the invention has the advantage that the sensor has a wide application prospect in the field of optical waveguide sensing devices, and is simple in structure, high in sensitivity and convenient to manufacture.

Description

technical field [0001] The invention relates to a tapered waveguide-assisted cascaded long-period waveguide grating sensor and a preparation method thereof, belonging to the field of optical sensing devices. Background technique [0002] Due to the excellent performance of long-period gratings such as light weight, small size, resistance to electromagnetic radiation, stable chemical properties, and no reflection, long-period grating devices are widely used in the fields of optical fiber sensing and optical communication, and are divided into long-period fiber gratings and How to improve the sensing sensitivity of long-period waveguide gratings has become an important research content. Long-period fiber gratings have achieved fruitful results in sensing, but their materials are single and their geometry is fixed. Compared with long-period fiber gratings, although the development of long-period waveguide gratings is late, long-period waveguide gratings are made of various mat...

Claims

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Application Information

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IPC IPC(8): G01D5/26G02B6/124G02B6/13
Inventor 张小贝李迎春朱姗庞拂飞刘云启王廷云
Owner SHANGHAI UNIV
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