Novel composite isolating layer based on biaxial texture metal substrate and preparation method thereof

A composite isolation layer and metal baseband technology, applied in the direction of metal layered products, metal material coating technology, chemical instruments and methods, etc., can solve the problem of poor surface morphology, unfavorable growth of rare earth oxide superconducting layer, texture degree Poor problems, high utilization rate, high process repeatability and reliability, and precise control of film thickness

Active Publication Date: 2012-11-14
SHANGHAI SUPERCONDUCTOR TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, La prepared by chemical solution deposition 2 Zr 2 o 7 Thin films with poor texture and poor ...

Method used

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  • Novel composite isolating layer based on biaxial texture metal substrate and preparation method thereof
  • Novel composite isolating layer based on biaxial texture metal substrate and preparation method thereof
  • Novel composite isolating layer based on biaxial texture metal substrate and preparation method thereof

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Embodiment 1

[0050] like figure 1 As shown, the La provided by the present invention 2 Zr 2 o 7 / YSZ / CeO 2 Schematic diagram of the structure of the embodiment of the composite isolation layer, which is based on the La 2 Zr 2 o 7 / YSZ / CeO 2 Composite isolation layer. The composite isolation layer adopts a three-layer structure, the upper layer is La 2 Zr 2 o 7 Isolation layer 1, the middle layer is YSZ isolation layer 2, and the lower layer is CeO 2 Isolation layer 3. Among them, La 2 Zr 2 o 7 The thickness of isolation layer 1 is 50nm, the thickness of YSZ isolation layer 2 is 60nm, CeO 2 The thickness of the isolation layer 3 is 80 nm.

[0051] The present invention adopts radio frequency magnetron sputtering coating method to prepare La 2 Zr 2 o 7 isolation layer, the method includes the following steps:

[0052] Step 1, La with a purity of 4N 2 Zr 2 o 7 The target material is loaded into the radio frequency magnetron sputtering coating system;

[0053] Step 2, t...

Embodiment 2

[0074] like figure 1 As shown, the La provided by the present invention 2 Zr 2 o 7 / YSZ / CeO 2 Schematic diagram of the structure of the embodiment of the composite isolation layer, which is based on the La 2 Zr 2 o 7 / YSZ / CeO 2 Composite isolation layer. The composite isolation layer adopts a three-layer structure, the upper layer is La 2 Zr 2 o 7 Isolation layer 1, the middle layer is YSZ isolation layer 2, and the lower layer is CeO 2 Isolation layer 3. Among them, La 2 Zr 2 o 7 The thickness of isolation layer 1 is 150nm, the thickness of YSZ isolation layer 2 is 20nm, CeO 2 The thickness of the isolation layer 3 is 30 nm.

[0075] The present invention adopts radio frequency magnetron sputtering coating method to prepare La 2 Zr 2 o 7 isolation layer, the method includes the following steps:

[0076] Step 1, La with a purity of 4N 2 Zr 2 o 7 The target material is loaded into the radio frequency magnetron sputtering coating system;

[0077] Step 2, ...

Embodiment 3

[0098] like figure 1 As shown, the La provided by the present invention 2 Zr 2 o 7 / YSZ / CeO 2 Schematic diagram of the structure of the embodiment of the composite isolation layer, which is based on the La 2 Zr 2 o 7 / YSZ / CeO 2 Composite isolation layer. The composite isolation layer adopts a three-layer structure, the upper layer is La 2 Zr 2 o 7 Isolation layer 1, the middle layer is YSZ isolation layer 2, and the lower layer is CeO 2 Isolation layer 3. Among them, La 2 Zr 2 o 7 The thickness of isolation layer 1 is 90nm, the thickness of YSZ isolation layer 2 is 50nm, CeO 2 The thickness of the isolation layer 3 is 60 nm.

[0099] The present invention adopts radio frequency magnetron sputtering coating method to prepare La 2 Zr 2 o 7 isolation layer, the method includes the following steps:

[0100] Step 1, La with a purity of 4N 2 Zr 2 o 7 The target material is loaded into the radio frequency magnetron sputtering coating system;

[0101] Step 2, t...

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Abstract

The invention discloses a novel composite isolating layer based on a biaxial texture metal substrate and a preparation method thereof. The novel composite isolating layer has a three-layer structure, wherein the upper layer is a lanthanum zirconate (La2Zr2O7) isolating layer, the intermediate layer is a yttria-stabilized zirconia (YSZ) isolating layer, and the lower layer is a cerium oxide (CeO2) isolating layer. A CeO2 cap layer in the traditional CeO2/YSZ/CeO2 and CeO2/YSZ/Y2O3 three-layer composite isolating layer structure is replaced by the lanthanum zirconate (La2Zr2O7), and the high-quality La2Zr2O7 isolating layer is prepared by employing a radio frequency magnetron sputtering coating technology. The method has high stability, high repeatability, high reliability and high deposition rate; and the prepared La2Zr2O7 isolating layer is dense and uniform and has high binding force with the YSZ isolating layer. The La2Zr2O7/YSZ/CeO2 composite isolating layer based on the metal substrate has single (00/) orientation, high in-plane and out-of-plane textures and high surface smoothness and is suitable for epitaxial growth of a high-performance rare earth oxide superconducting layer on the isolating layer.

Description

technical field [0001] The invention relates to the field of new oxide high-temperature superconductors, specifically a novel composite isolation layer based on a biaxially textured metal substrate and a preparation method thereof, more specifically a La 2 Zr 2 o 7 / YSZ / CeO 2 Composite isolation layer and La 2 Zr 2 o 7 The preparation method of the isolation layer. Background technique [0002] Over the past century, superconducting materials have attracted the attention of many scientists due to their unique physical properties (non-resistance, diamagnetism, etc.). Devices and equipment such as superconducting cables, superconducting transformers and superconducting current limiters made of superconducting tapes have the advantages of small size, light weight, high efficiency and low energy consumption. They are used in electric power, energy, medical equipment, and national defense equipment It has broad application prospects in many fields. In the late 1990s, Bi-b...

Claims

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Application Information

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IPC IPC(8): B32B15/04B32B9/04C23C14/35C23C14/08
Inventor 徐达刘林飞李贻杰
Owner SHANGHAI SUPERCONDUCTOR TECH CO LTD
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