Method for manufacturing millimeter wave cavity filter

Abstract

The invention discloses a method for manufacturing a millimeter wave cavity filter. According to the method, photoresist is used as the structure material and matched with mask plates with different patterns, and a technique of uniform photoresist at multilayers, photoetching layer by layer and final once development is adopted so as to precisely construct a complex three-dimensional structure of the cavity filter. A flexible material PDMS (polydimethylsiloxane) with excellent elasticity is used for carrying out die rollover on the three-dimensional structure so as to construct a die; the die is further subjected to injection molding and solidification so as to rapidly and precisely copy the cavity structure and a cover plate structure; and finally the cavity structure and the cover plate structure are bonded and packaged so as to obtain the complete millimeter wave cavity filter. The filter manufactured by using the method provided by the invention is small in size, high in precision, high in frequency, wide in frequency band and large in signal capacity; and a cavity of the filter is integrally made, errors caused by assembling are avoided, and thus the performance of the filter is improved. The manufacturing method has the advantages of being simple in process, high in manufacturing precision and the like. The copying method has the advantages of being rapid in copying, high in copying precision and the like.

Description

technical field [0001] The invention relates to the technical field of microwave communication and electronic countermeasures, in particular to a manufacturing method of a millimeter-wave cavity filter closely related to a micromachining process. Background technique [0002] As a common frequency selection device, filters are widely used in modern communication technology and electronic countermeasures to eliminate clutter and interference signals other than the desired signal frequency. Cavity filter is one of many filters. Because of its strong structure, high operating frequency band, low loss, and high power withstand, it is widely used in various military and civilian electronic systems. As a purely structural device, the performance index and reliability of the cavity filter depend on its own structural characteristics. [0003] Nowadays, radio spectrum resources are becoming increasingly scarce, and millimeter wave has attracted more and more attention and favor bec...

AI Technical Summary

Problems solved by technology

For traditional mechanical processing, its processing accuracy is low, it is difficult to manufacture tiny structures, and it is not suitable for the manufacture and mass production of high-frequency microwave devices; the silicon process is complicated to operate, and it is difficult to manufacture complex three-dimensional structures, and silicon is not a good insulating material, which is not convenient Integrate with other MEMS microwave devices and systems

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