Manufacture method of millimeter wave cavity filter

Abstract

The invention relates to a manufacture method of a millimeter wave cavity filter. Photoresists are adopted as the auxiliary materials, electroplated metal materials are adopted as the structural materials, mask plates with different patterns are matched, the photoresist technology of multi-layer glue homogenizing, layer-by-layer photoetching and developing, electroplating and final stripping and curing is adopted, and a complex three-dimensional metal structure of the cavity filter can be accurately constructed. Flexible materials polydimethylsiloxane (PDMS) with excellent elasticity are used for mold turning to build a mold, then the mold is cured in injection molding mode, a cavity structure and a cover plate structure can be copied fast and accurately, and finally the cavity structure and the cover plate structure are bonded and packaged to obtain the whole millimeter wave cavity filter. The millimeter wave cavity filter manufactured in the manufacture method is light in volume, high in accuracy and frequency, wide in bandwidth and large in signal capacity. A cavity of the filter is integrally arranged so that error caused by assembling is avoided and the performance of the filter is improved. The manufacture method has the advantages of being simple in process, high in manufacture accuracy and the like.

Description

technical field [0001] The invention relates to the technical field of microwave communication and electronic countermeasures, in particular to a manufacturing method of a millimeter-wave cavity filter closely related to a micromachining process. Background technique [0002] Filters are widely used in modern communications and electronic countermeasures to eliminate clutter and interference signals other than the desired signal frequency, and are a common frequency-selective device. There are many types of filters, among which cavity filters are favored because of their strong structure, high operating frequency band, low loss, and high power withstand. At the same time, the cavity filter is a purely structural device, and its performance index and reliability depend on its own structural characteristics. [0003] As radio frequency spectrum resources become increasingly scarce, it is of great significance to find and make full use of other suitable radio waves. Millimete...

AI Technical Summary

Problems solved by technology

[0004] High-frequency filter devices, due to their small size and high precision requirements, are difficult to realize by traditional machining. However, with the increasing development of MEMS (Microelectromechanical System) technology, especially the gradual maturity of silicon micro-technology, many researchers Start to apply MEMS technology, however, silicon process operation is complicated, it is difficult to manufacture complex three-dimensional structure, and, due to poor insulation, silicon is not an ideal RF MEMS material

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