Film plating device and method for preparing TCO (Transparent Conducting Oxide) glass online by floating method

Abstract

The invention discloses a method for preparing TCO (Transparent Conducting Oxide) glass online by a floating method and a special film plating device. The film plating device is characterized in that a film plating reactor is a rectangular structure comprising double channels for inputting gas and double channels for discharging gas; the film plating device is fixed above a floating-method glass production line and the lower part of the film plating device is located in a temperature region of 630-650 DEG C in a floating-method glass tin groove; the film plating reactor is further internally provided with six rectangular oil cooling circulating cavities and two air discharging cavities; a mixing cavity is arranged between two side wall plates of a central line and the width of the mixing cavity is 100-200mm; and an aerosol guiding channel is arranged and the width of the aerosol guiding channel is 10-30mm. The method comprises the following steps: (1) preparing a base film; and (2) mixing a tin source, a fluorine source doping agent, a stabilizing agent and a catalyst precursor in the film plating reactor to form a TCO film layer. The method and the film plating device disclosed by the invention have the advantages of small investment, low cost, operability and easiness for maintenance; the uniformity of the TCO film layer is good, the wear resistance, the conductivity and the visible light transmittance are high; and the industrial production is easy to realize.

Description

technical field [0001] The invention relates to a coating device and method for preparing TCO glass on-line by a float method, and belongs to the technical field of float glass processing. Background technique [0002] TCO (Transparent Conductive Oxide, transparent conductive oxide coating) glass is uniformly coated with a layer of transparent conductive oxide film on the surface of flat glass by physical or chemical coating method. The conductive principle of the conductive thin film is to dope a small amount of other elements into the intrinsic semiconductor with weak conductivity, which will cause a significant change in the conductivity of the semiconductor. These trace elements are called doping elements, and the doped semiconductor is called doped semiconductor. [0003] There are many coating materials and processes for transparent conductive oxides. Through continuous screening through scientific research, there are currently three main types of TCO glass: indium ti...

AI Technical Summary

Problems solved by technology

The first two are finished ultra-clear float glass after cutting, edging, cleaning, reheating and other processes before coating, because it is intermittent production, low efficiency, high cost, and the film layer is not strong, use Short service life is not conducive to the promotion of this technology

FTO glass has relatively low cost, easy laser etching, good optical performance, and a certain degree of haze. It is the mainstream product of thin-film solar cell electrode glass, but it is produced by online CVD (chemical vapor deposition) technology, with complex systems and expensive equipment. Difficult to operate, the production process is not stable enough

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