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Method of plating ZnO film on surface of metal material

A technology of metal materials and thin films, which is applied in the field of material surface modification, can solve problems affecting the judgment of optical signals, variable components, and complex coating preparation processes, etc., to achieve easy visual observation, low industrialization cost, and wear resistance Good results

Active Publication Date: 2015-03-25
江苏澳芯微电子有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, the U.S. Air Force Institute of Technology and the University of California have jointly developed a vacuum arc-magnetron sputtering-pulse laser deposition hybrid technology to prepare a multilayer friction coating with the function of an optical sensor on the steel surface. The coating preparation process is complicated. The composition is changeable, which will affect the judgment of the optical signal

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  • Method of plating ZnO film on surface of metal material
  • Method of plating ZnO film on surface of metal material
  • Method of plating ZnO film on surface of metal material

Examples

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Comparison scheme
Effect test

Embodiment 1

[0023] The method for plating ZnO thin film on the surface of aluminum sheet comprises the following steps:

[0024] (1) The surface of the aluminum sheet is polished, and ultrasonic cleaning is carried out with acetone;

[0025] (2) Put the ultrasonically cleaned aluminum sheet into a magnetron sputtering furnace, and use a zinc oxide target to deposit a ZnO film on the surface of the aluminum sheet. The specific method is as follows: place the zinc oxide at the target position, and The pole spacing is 3 cm; the magnetron sputtering furnace is evacuated to a vacuum degree of 1.0×10 -4 Pa, fill in argon to a pressure of 5 Pa, clean and activate the surface of the aluminum sheet; fill in a mixed gas of oxygen and argon to a pressure of 25 Pa, and the pressure ratio of oxygen and argon in the mixed gas is 1:1 , sputtering power 50W. Adjust the temperature in the magnetron sputtering furnace to 320°C and keep it warm for 1 hour; turn off the power, and evacuate the magnetron sp...

Embodiment 2

[0027] The method for plating ZnO thin film on the surface of aluminum sheet comprises the following steps:

[0028] (1) The surface of the aluminum sheet is polished, and ultrasonic cleaning is carried out with acetone;

[0029] (2) Put the ultrasonically cleaned aluminum sheet into a magnetron sputtering furnace, and use a zinc oxide target to deposit a ZnO film on the surface of the aluminum sheet. The specific method is as follows: place the zinc oxide at the target position, and The pole spacing is 5 cm; the magnetron sputtering furnace is evacuated to a vacuum degree of 3.0×10 -4 Pa, filled with argon gas to a pressure of 10 Pa, cleaning and activating the surface of the aluminum sheet; filled with a mixed gas of oxygen and argon to a pressure of 30 Pa, the pressure ratio of oxygen and argon in the mixed gas is 1:3, splashing The injection power is 60W, adjust the temperature in the magnetron sputtering furnace to 380°C, and keep it warm for 5 hours; turn off the power,...

Embodiment 3

[0031] The method for plating ZnO thin film on the surface of aluminum sheet comprises the following steps:

[0032] (1) The surface of the aluminum sheet is polished, and ultrasonic cleaning is carried out with acetone;

[0033] (2) Put the ultrasonically cleaned aluminum sheet into a magnetron sputtering furnace, and use a zinc oxide target to deposit a ZnO film on the surface of the aluminum sheet. The specific method is as follows: place the zinc oxide at the target position, and The pole spacing is 4cm; the magnetron sputtering furnace is evacuated to a vacuum degree of 1.0×10 -4 Pa, fill in argon to a pressure of 10 Pa, clean and activate the surface of the aluminum sheet; fill in a mixed gas of oxygen and argon to a pressure of 35Pa, the pressure ratio of oxygen and argon in the mixed gas is 1:2, the power 70W, adjust the temperature in the magnetron sputtering furnace to 360°C, keep warm for 2 hours; turn off the power, and vacuum the magnetron sputtering furnace to a...

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Abstract

The invention discloses a method of plating a ZnO film on the surface of a metal material, and relates to the field of material surface modification. The method comprises the following steps: polishing the surface of the metal material, cleaning, putting in a magnetron sputtering furnace, and placing zinc oxide in a target, wherein the inter-electrode distance of the metal material and the zinc oxide is 3-5 cm; vacuumizing the magnetron sputtering furnace until the vacuum degree is 1.0*10<-4>Pa-5.0*10<-4>Pa, inflating argon until the pressure intensity if 1-10Pa, cleaning and activating the metal material; inflating the mixed gas of oxygen and argon until the pressure intensity is 20-35Pa, the sputtering power is 50-80W and the temperature in the magnetron sputtering furnace is 320-380 DEG C, and keeping the temperature; and turning off the power source, vacuumizing the magnetron sputtering furnace, cooling to room temperature, and discharging out of the furnace. The method disclosed by the invention is simple in process and low in cost; and the ZnO film has obvious luminescence characteristic in the abrasion process, and is low in friction coefficient and good in abrasive resistance.

Description

technical field [0001] The invention relates to the field of material surface modification, in particular to a method for plating ZnO on the surface of metal materials. Background technique [0002] Friction and wear are one of the reasons for the limited life of space mechanical systems, such as the antenna drive system of artificial satellites, the solar cell sail mechanism, and the drive mechanism of optical instruments. Extreme external conditions make some material surface wear conditions that are difficult to observe and predict vary greatly. Once a component exceeds the tolerance limit and cannot get timely feedback, it will jeopardize the operation of the entire system and cause incalculable losses. In order to ensure the safe operation of the space mechanical system, prolong the service life of aerospace equipment, and minimize losses, real-time monitoring, positioning and early warning of the friction process of the space mechanical system are inevitable requiremen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/08
Inventor 吴红艳赵浩峰谢爱根姚义俊刘斌徐佳
Owner 江苏澳芯微电子有限公司
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