Flexible substrate silicon-based multi-junction stacked thin film solar cell and manufacturing method thereof

Abstract

The invention relates to a photovoltaic solar cell and discloses a flexible substrate silicon-based multi-junction laminated thin-film solar battery. The flexible substrate silicon-based multi-junction laminated thin-film solar battery comprises a back reflection electrode, microcrystalline silicon (muc-Si:H) or amorphous silicon germanium (a-SiGe:H) bottom battery, an amorphous silicon (a-Si:H) top battery, a transparent conducting film and a metal grid line which are sequentially deposited on a metal foil or polyester film substrate, wherein the bottom battery is electrically connected with the top battery by adopting a composite tunneling junction. The invention also discloses a manufacturing method for the battery. The manufacturing method comprises the following steps of: carrying out sputtering deposition on the back reflection electrode; depositing microcrystalline silicon or amorphous silicon germanium bottom battery; depositing the amorphous silicon top battery; carrying out sputtering deposition on transparent conducting films such as ITO (Indium Tin Oxide), SnO2.F, ZnO:Al, ZnO:Ga and the like; carrying out electro chemical passivation; preparing the metal grid line and the like. The flexible substrate silicon-based multi-junction laminated thin-film solar battery disclosed by the invention has the beneficial effects that the conversion efficiency of the battery and the large-area uniformity are increased, high efficiency and high power specific weight ratio are obtained and the like; and meanwhile, a preparation process is simple and the scale production can be realized.

Description

technical field [0001] The invention relates to a photovoltaic cell, in particular to a flexible substrate silicon-based multi-junction lamination thin film solar cell, and also relates to a manufacturing method of the solar cell. Background technique [0002] In the thin-film solar cells widely used at present, amorphous silicon thin-film materials are mainly used, but there are two important problems in amorphous silicon thin-film solar cells: (1) the light-induced degradation effect makes the battery stability not ideal; (2) The gap is wide, and the material itself does not fully absorb long-wave light in the solar radiation spectrum, which limits the further improvement of cell efficiency. In order to solve these two problems, research work on amorphous silicon / microcrystalline silicon stacked solar cells and amorphous silicon / amorphous silicon germanium stacked solar cells has been widely carried out in recent years. The tandem solar cell expands the spectral response ...

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Problems solved by technology

[0009] In order to solve the deficiencies in the prior art, another solution of the purpose of the present invention also provides a method for manufacturing a silicon-based multi-junction laminated thin film solar cell on a flexible substrate. Using this solution, the above-mentioned flexible substrate silicon-based multi-junction solar cell is solved. The microscopic "defects" and macroscopic "pinholes" of stacked thin film solar cells, as well as the easy failure of silicon-based thin film solar cells on flexible substrates at high temperature or high ion beam energy, and the electrical characteristics of grid lines prepared by screen printing Unsatisfactory performance and other issues

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