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Novel aluminum nanometer particle surface plasmon enhanced solar battery

A surface plasmon and solar cell technology, applied in the field of solar cells, can solve problems such as density increase, matching, and carrier surface recombination, so as to improve efficiency, improve light absorption, and overcome carrier surface recombination Effect

Inactive Publication Date: 2013-05-08
CHINA UNIV OF GEOSCIENCES (BEIJING)
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Problems solved by technology

[0003] In order to solve the deficiencies of the existing thin-film solar cell light trapping technology, the present invention provides a solar cell based on the novel aluminum nanoparticle surface plasmon light trapping technology, which overcomes the surface recombination of carriers caused by the texture, the effective The increase of the density of defect states in the source layer and the inability to match the band gap of the active layer can effectively improve the light absorption of the solar cell, thereby improving its photoelectric conversion efficiency

Method used

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  • Novel aluminum nanometer particle surface plasmon enhanced solar battery

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Embodiment Construction

[0016] Such as figure 1 , on the stainless steel substrate (1), use magnetron sputtering equipment to deposit ITO or AZO transparent conductive film (2) in the vacuum chamber, the background vacuum degree reaches 6*10 -4 Pa, the film thickness is between 50-100nm; deposit aluminum film in the same sputtering vacuum chamber, the deposition pressure is 0.8-3Pa, the substrate temperature is 120°C-200°C, and the film thickness is between 15nm-60nm; The film is annealed in situ or under the protection of nitrogen, the annealing temperature is maintained at 300°C-400°C, and the annealing time is 1.5-3 hours to form an aluminum nanoparticle array (3), the size of which is between 20-60nm, which can be passed Extend the annealing time to reduce its density without using photolithography; use chemical vapor deposition on the aluminum nanoparticle array to prepare a conventional NIP junction (4), and its material can be a silicon film or a silicon-germanium alloy film; use a magnetic C...

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Abstract

The invention discloses a novel aluminum nanometer particle surface plasmon enhanced solar battery and belongs to the photovoltaic technical field. The novel aluminum nanometer particle surface plasmon enhanced solar battery is characterized in that magnetron sputtering equipment is used for depositing aluminum film inside a vacuum chamber body, and then aluminum nanometer particle array is formed through in situ annealing or nitrogen protective annealing to stimulate the surface plasmon, and photolithography is not needed; by adjusting aluminum nanometer particle size and density, resonant frequency of the surface plasmon is adjusted, and then the resonant frequency of the surface plasmon is in optical matching with forbidden bandwidth (1.2-1.7 ev) of a thin film solar battery active layer, and light absorption is improved by utilizing near-field enhanced effect and scattering effect, and therefore efficiency of a solar battery is improved. The problems that current carrier surface recombination and increased active layer defect mode density caused by utilizing texture in a traditional thin film solar battery light-trapping technology is overcome, and complex processes of wet etching, photoetching and the like are not needed, and therefore cost of the solar battery is greatly reduced.

Description

technical field [0001] The invention relates to a solar cell based on the surface plasmon enhancement effect of aluminum nanoparticles, belonging to the field of photovoltaic technology. Background technique [0002] The light-trapping technology of existing thin-film solar cells mainly focuses on the following two aspects: using a textured front electrode to enhance light scattering to reduce reflection loss; using a textured back reflector on the back of the cell. Although these light-trapping structures can confine incident photons to a certain extent inside the battery, more photo-generated carriers will be generated by multiple absorptions, thereby increasing the short-circuit current of the battery. But this technology also has great problems: (1) The defect state density of the active layer grown on the thin film of this texture or texture structure is relatively large, which leads to a decrease in the open circuit voltage and fill factor of the battery; ( 2) The inc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0352H01L31/075
CPCY02E10/50Y02E10/548
Inventor 郝会颖
Owner CHINA UNIV OF GEOSCIENCES (BEIJING)
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