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Lubricant composition for polishing glass substrates and polishing slurry

A glass substrate and slurry technology, applied in chemical instruments and methods, magnetic recording, instruments, etc., can solve the problems of low surface roughness, inability to obtain, and insufficient polishing speed in finishing, and reduce surface residues , The effect of improving the polishing speed

Inactive Publication Date: 2015-02-25
MORESCO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, for the polishing liquid composition of the prior art, in addition to not being able to obtain a sufficient polishing rate, it is also impossible to obtain a high-quality hard disk glass substrate suitable for high recording density and low surface roughness after finishing.

Method used

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  • Lubricant composition for polishing glass substrates and polishing slurry
  • Lubricant composition for polishing glass substrates and polishing slurry
  • Lubricant composition for polishing glass substrates and polishing slurry

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1～8 and comparative example 1～8

[0062] The components shown in the following Tables 1 to 4 were mixed (values ​​are % by weight) to prepare a lubricant for hard disk glass substrates. As water, purified water was used. The ricinoleic acid in Comparative Example 2 is a carboxylic acid with 16 to 40 carbon atoms used in JP-A-2004-306248 (Patent Document 2); ) is a fatty acid with 10 to 22 carbon atoms. In addition, in Comparative Example 1, glucose 1,1-glycosidic disaccharide was used as sugars other than cyclodextrin.

[0063] A polishing slurry for hard disk glass substrates was prepared by diluting 17.5 g of the lubricating composition with 321.5 g of pure water, adding diamond concentration: 1.5% by weight and average particle size: 30 nm [by dynamic light scattering method (Otsuka Electronics Co., Ltd. Company DLS-6000HL) measured] diamond slurry 10.9 g to obtain a polishing slurry having a diamond abrasive grain content of 0.05% by weight. Polishing evaluation of hard disk glass substrates was perform...

Embodiment 9～12 and comparative example 9～16

[0078] Except having mixed the components shown in following Tables 5-6 (value is weight%), and prepared the lubricating liquid for glass substrates, it carried out similarly to Example 1, and prepared the polishing slurry. Using this polishing slurry, polishing evaluation was performed using various glass substrates having different components, and the results are shown in Tables 5-6.

[0079] [table 5]

[0080]

[0081] [Table 6]

[0082]

[0083] Glass substrate A: with silicic acid (SiO 2 ) as the main component, and a glass substrate with sodium oxide, aluminum oxide, and potassium oxide as subcomponents.

[0084] Glass substrate B: with silicic acid (SiO 2 ) as the main component, with sodium oxide, aluminum oxide, potassium oxide, P 2 o 5 Subcomponent glass substrate.

[0085] Glass substrate C: with silicic acid (SiO 2 ) is a glass substrate whose main component is aluminum oxide and potassium oxide.

[0086] Glass substrate D: with silicic acid (SiO 2 )...

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Abstract

Provided are a lubricant composition for polishing glass substrates and a polishing slurry that contain components (A) and (B), and when necessary, components (C) and / or (D). (A) A cyclic oligosaccharide (B) Water (C) An alkanolamine (D) A C6-24 aliphatic carboxylic acid

Description

technical field [0001] The present invention relates to a lubricating composition for polishing a glass substrate (hereinafter referred to as a lubricating composition for polishing) and a polishing slurry using the composition. More specifically, it relates to a polishing lubricating composition and a polishing slurry that are excellent in improving the processing rate and improving the surface roughness of finishing in polishing of a glass substrate. Background technique [0002] In recent years, the development of electronic equipment, optical equipment, energy-saving equipment, etc. has been actively carried out. One of the important materials in developing these is glass. For example, in electronic materials, there are hard disk drive glass substrates, flat glass for liquid crystal display panels or organic EL display panels, and in optical instruments, there are photomask glass for phototranscription devices, camera lenses, and glass for LED lighting. , In energy-sav...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09K3/14G11B5/725
CPCG11B5/725C09K3/1409C09K3/1463
Inventor 稻垣秀和南有志浜岛研太郎
Owner MORESCO
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