Hermetic seal method of optical glass and Kovar alloy

An optical glass and hermetic sealing technology, which is applied in the field of hermetic sealing of optical glass and Kovar alloy, can solve the problems of high interface brittleness, failure of sealing process, strict process requirements, etc., and achieve good mechanical strength and air tightness performance, smoothness The effect of no damage to the degree and light transmittance, and simple sealing process

Inactive Publication Date: 2013-06-26
GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The formation process of the oxide film layer is very demanding on the process, including heat treatment temperature, time, atmosphere and other process parameters will have a significant impact on the chemical composition, thickness, density, etc. of the final formed oxide film layer, improper control of process parameters , can easily lead to the failure of the final sealing process
Secondly, the sealing surface of the optical window sealed by these two technologies is composed of glass phase or ceramic phase, the interface is brittle, the residual stress in the sealing process cannot be effectively released, and the stress impact resistance of the entire sealing structure Poor, low reliability

Method used

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  • Hermetic seal method of optical glass and Kovar alloy
  • Hermetic seal method of optical glass and Kovar alloy
  • Hermetic seal method of optical glass and Kovar alloy

Examples

Experimental program
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Effect test

Embodiment 1

[0023] In this embodiment, Pb92.5Sn5Ag2.5 solder is used for hermetic sealing on the 4J29 Kovar alloy substrate. K4 optical glass window.

[0024] Firstly, prepare and process 4J29 Kovar alloy parts, K4 optical glass sheets, and Pb92.5Sn5Ag2.5 solder rings according to the design drawings. Light window structure design drawings see figure 1 : Among them, the 4J29 Kovar alloy part is the outer diameter the inside diameter of A ring with a thickness of 2.4mm, centered with counterbore for the assembly of optical glass and solder ring; the size of K4 optical glass is The outer diameter of the Pb92.5Sn5Ag2.5 solder ring is the inside diameter of Thickness 0.4mm. Then, the 4J29 Kovar alloy piece, the K4 optical glass piece, and the Pb92.5Sn5Ag2.5 solder ring were ultrasonically cleaned in acetone and absolute ethanol for 10 min, respectively, and dried in an oven at 80°C for 1 hour. Then, a metal transition layer is sputtered on the welded surface of the 4J29 Kovar ...

Embodiment 2

[0028] In this embodiment, Pb37Sn63 solder is used to hermetically seal the 4J29 Kovar alloy substrate K9 optical glass window.

[0029] Figure 6 for Structural design drawings of the light window: Among them, the 4J29 Kovar alloy part is the outer diameter the inside diameter of A ring with a thickness of 7mm, centered with counterbore; the size of the K4 optical glass sheet is The outer diameter of the Pb37Sn63 solder ring is the inside diameter of Thickness 0.6mm. Prepare and process 4J29 Kovar alloy parts, K9 optical glass sheets, and Pb37Sn63 solder rings according to the design drawings. 4J29 Kovar parts, K9 optical glass pieces, and Pb37Sn63 solder rings were ultrasonically cleaned in acetone and absolute ethanol for 10 min, respectively, and dried in an oven at 80°C for 1 hour. Then, a metal transition layer was sputtered on the welding surface of the 4J29 Kovar alloy preform and the K9 optical glass sheet by magnetron sputtering. The sputtering cond...

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Abstract

The invention discloses a hermetic seal technique of optical glass and Kovar alloy, belonging to the technical field of vacuum hermetic packaging. By using a Pb welding flux as a braze welding material, high-temperature treatment is carried out at certain temperature to finally implement welding between the two dissimilar materials (optical glass and Kovar alloy), thereby obtaining the packaging structural member formed by sealing a large-area optical window on a Kovar alloy pipe shell. The optical window structure sealed by the technique has the advantages of favorable mechanical strength, favorable air tightness, simple seal technique and high yield. The hermetic seal technique of optical glass and Kovar alloy is applicable to the fields of manufacturing of optical equipment and vacuum hermetic packaging of optical devices.

Description

technical field [0001] The invention belongs to the technical field of vacuum airtight packaging, in particular to a method for hermetically sealing optical glass and Kovar alloy. Background technique [0002] The vacuum airtight sealing structure of the optical window is widely used in the fields of vacuum airtight packaging of optical devices and optical equipment manufacturing. The vacuum airtight joint of the optical window usually adopts the fusion welding method or the glass solder brazing method. The so-called fusion welding method refers to the melting and softening of the welding surface of the glass window at high temperature, thereby reacting with the oxide film on the surface of Kovar alloy to form a metallurgical joint surface, thereby obtaining a hermetic sealing structure; the glass solder brazing method is through The molten glass solder at high temperature reacts with the sealing surface of the glass window and the oxide film on the surface of the Kovar all...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C27/00C03C27/04
Inventor 崔建东苑鹏杜军王磊毛昌辉
Owner GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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