Method for preparing boron-doped diamond and carbon nanotube composite nanocone
A carbon nanotube composite and multi-walled carbon nanotube technology, which is applied in the field of nanomaterials, can solve problems such as non-existence, and achieve the effects of size and density controllability, low field emission threshold voltage, and long emission life
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[0019] The invention provides a method for preparing boron-doped diamond and carbon nanotube composite nano-cones. Nano-diamond particles are pre-deposited on the surface of vertically oriented multi-walled carbon nanotubes by electrostatic spraying, and the carbon nano- The tubes are aggregated into a cone-shaped structure; further, a boron-doped diamond film is deposited on the carbon nanotube cone-shaped structure by hot filament chemical vapor deposition to form a composite nanocone of boron-doped diamond and carbon nanotubes with good field emission properties. , including the following steps:
[0020] Step 1, performing surface cleaning treatment on the monocrystalline silicon substrate. The specific operation is: first immerse the substrate in a mixed solution of acetone and ethanol for ultrasonic cleaning, then put it into deionized water for ultrasonic cleaning, and then dry it with cold air;
[0021] Step 2, sequentially sputter deposit a layer of SiO with a thickne...
Embodiment 1
[0028] Multi-walled carbon nanotubes were prepared by plasma-enhanced chemical vapor deposition, and nano-diamond particles were pre-deposited on the surface of vertically oriented multi-walled carbon nanotubes by electrostatic spraying, and the carbon nanotubes were aggregated into cones under the action of electrostatic force Structure; further adopting hot wire chemical vapor deposition method to deposit a layer of boron-doped diamond film on the carbon nanotube cone structure to form a boron-doped diamond and carbon nanotube composite nanocone with good field emission performance, which specifically includes the following steps :
[0029] Step 1, performing surface cleaning treatment on the monocrystalline silicon substrate. The specific operation is: first immerse the substrate in a mixed solution of acetone and ethanol for ultrasonic cleaning, then put it into deionized water for ultrasonic cleaning, and then dry it with cold air;
[0030] Step 2, sequentially sputter d...
Embodiment 2
[0037] Multi-walled carbon nanotubes were prepared by plasma-enhanced chemical vapor deposition, and nano-diamond particles were pre-deposited on the surface of vertically oriented multi-walled carbon nanotubes by electrostatic spraying, and the carbon nanotubes were aggregated into cones under the action of electrostatic force Structure; further adopting hot wire chemical vapor deposition method to deposit a layer of boron-doped diamond film on the carbon nanotube cone structure to form a boron-doped diamond and carbon nanotube composite nanocone with good field emission performance, which specifically includes the following steps :
[0038] Step 1, performing surface cleaning treatment on the monocrystalline silicon substrate. The specific operation is: first immerse the substrate in a mixed solution of acetone and ethanol for ultrasonic cleaning, then put it into deionized water for ultrasonic cleaning, and then dry it with cold air;
[0039] Step 2, sequentially sputter d...
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