Terahertz metamaterial unit structure and preparation, adjusting and control method thereof

A unit structure, metamaterial technology, applied in the field of metamaterials and terahertz detection, can solve problems such as unfavorable practical application and theoretical research, and achieve the effect of simple structure, simple design, and easy integration

Inactive Publication Date: 2013-08-21
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology

[0006] In short, the current terahertz metamaterial structure and the regulation method of metamaterial ter

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  • Terahertz metamaterial unit structure and preparation, adjusting and control method thereof
  • Terahertz metamaterial unit structure and preparation, adjusting and control method thereof
  • Terahertz metamaterial unit structure and preparation, adjusting and control method thereof

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[0035] The present invention will be further described below in conjunction with the drawings and specific implementations.

[0036] The bottom layer provided by the present invention is a continuous metal film, the middle is a dielectric layer, and the surface layer is a metamaterial structure composed of two parts of metal "I" on the inside and a "box" on the periphery, which has a special terahertz response performance. The embodiment of the present invention for making the metamaterial structure is as follows: (1) A single crystal silicon wafer is selected as the substrate 1 of the metamaterial, and after cleaning, it is dried with high-purity nitrogen for use; (2) On the surface of the substrate 1, A continuous gold film with a thickness of 5~2000 nm is deposited using an electron beam evaporation system as the underlying metal 2 of the metamaterial; (3) On the surface of the continuous gold film 2 described above, a layer with a thickness of 0.05~40 μm is spin-coated Polyi...

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Abstract

The invention discloses a terahertz metamaterial unit structure and a preparation, adjusting and control method thereof and relates to the technical field of metamaterials and terahertz detection. The terahertz metamaterial unit structure is composed of a bottom layer, a middle medium layer and a surface layer, wherein the bottom layer is a layer of continuous metal film, the middle medium layer is one of a polyimide film, a silicon nitride film, a silicon oxide film, an amorphous silicon film, a silicon oxynitride film, an aluminum oxide film, a hafnium oxide film and an aluminum and hafnium oxide film, and the surface layer is a surface resonator, and the surface resonator is graphical metal with the interior in an H shape and the periphery of a framework structure. According to the adjusting and control method of the terahertz response characteristic of the metamaterial, the whole metamaterial unit structure meeting impedance matching requirements can be decreased or amplified proportionally, and the terahertz absorption frequency and the response frequency band of the metamaterial can be adjusted within an ideal range. The terahertz metamaterial unit structure has the advantages of being simple in structure, easy to integrate, and capable of being applied to terahertz detectors.

Description

technical field [0001] The invention relates to the technical field of metamaterials and terahertz detection, in particular to a terahertz metamaterial unit structure and a preparation and control method thereof. Background technique [0002] Due to the lack of effective terahertz (THz) source and detection technology, THz research has stagnated for a long time. In recent years, with the rapid development of physics, materials science, laser engineering and nanotechnology, terahertz technology has made great progress and has become a current international research hotspot. Terahertz detectors detect the shape or composition of objects by detecting changes in terahertz photons passing through the object. Compared with conventional detection technologies such as X-rays and nuclear magnetic resonance, terahertz detectors have the advantages of fast detection speed, high precision, strong penetration, and small radiation damage. Among them, uncooled terahertz detectors have br...

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Application Information

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IPC IPC(8): H01Q15/00H01P1/20G02B5/00
Inventor 许向东黄锐蒋亚东敖天宏何琼马春前孙自强温粤江
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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