Diffusion impervious layer modification for flexible substrate
A flexible substrate and barrier layer technology, applied in coatings, climate sustainability, metal material coating technology, etc., can solve problems such as cracking and lower battery yield
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[0018] The present invention will be further explained in detail with the following examples.
[0019] The stainless steel with a thickness of 25μm is selected as the flexible substrate, and the ultrasonic cleaning method is adopted. The solvent and sequence are: stainless steel cleaning agent (15min)→deionized water (15min)→nitrogen drying.
[0020] The cleaned stainless steel substrate is placed in a horizontal opposing magnetron sputtering target equipment, using a chromium target with a purity of 99.5% or more, the sputtering gas is argon with a purity of 99.999%, the working pressure is 2.0Pa, and the background vacuum 3.0×10 -3 Pa, the substrate temperature is 200℃, and the distance between the target and the substrate is 100mm. During sputtering, argon gas is pre-sputtered to clean the target surface, and the sputtering starts after the glow is stable. Sputtering ends for 5-20 min.
[0021] Using this method to sputter a 1-2μm thick chromium barrier layer on a flexible stain...
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