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Diffusion impervious layer modification for flexible substrate

A flexible substrate and barrier layer technology, applied in coatings, climate sustainability, metal material coating technology, etc., can solve problems such as cracking and lower battery yield

Inactive Publication Date: 2013-09-11
任丘市永基光电太阳能有限公司
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Problems solved by technology

However, due to the stress matching problem between the oxide and the metal substrate, cracking is prone to occur in the subsequent etching process, thereby reducing the yield of the battery.

Method used

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  • Diffusion impervious layer modification for flexible substrate

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Embodiment Construction

[0018] The present invention is further described in detail in conjunction with the following examples.

[0019] Stainless steel with a thickness of 25 μm was selected as the flexible substrate, and the method of ultrasonic cleaning was adopted. The solvent and the order of use were: stainless steel cleaning agent (15min) → deionized water (15min) → nitrogen drying.

[0020] Place the cleaned stainless steel substrate in the horizontal facing magnetron sputtering target equipment, using a chromium target with a purity of more than 99.5%, the sputtering gas is argon with a purity of 99.999%, the working pressure is 2.0Pa, and the background vacuum 3.0×10 -3 Pa, the substrate temperature is 200°C, and the distance between the target and the substrate is 100mm. During sputtering, argon gas is pre-sputtered to clean the target surface, and sputtering starts after the glow stabilizes. Sputtering 5-20min ends.

[0021] Using this method to sputter a 1-2 μm thick chromium barrier ...

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Abstract

The invention discloses a modification method of adding an impervious layer to a flexible substrate in a flexible CIGS (Copper Indium Gallium Selenide) thin-film solar cell. Stainless steel is the preferred material for the flexible CIGS thin-film solar cell; however, diffusion of elements such as Fe and Cu in the substrate can cause reduction of the quality of the cell. Therefore, the seeking of an appropriate diffusion impervious layer material and a low-cost preparation process thereof is meaningful for improving device efficiency and reducing production cost. A 1-2 micron chromium diffusion impervious layer is deposited on a stainless steel substrate through a direct-current magnetron sputtering process; as a result, the crystallization quality of a back electrode layer and a CIGS absorption layer thin film both grown on the substrate can be obviously improved.

Description

technical field [0001] The invention relates to the modification of a flexible substrate in a flexible CIGS thin film solar cell, mainly a preparation method for adding a barrier layer to the flexible substrate. Background technique [0002] Stainless steel foil can adapt to the high-temperature preparation environment required for high-efficiency devices, and its price is much lower than titanium foil and molybdenum foil. It is the preferred material for flexible CIGS thin film solar cell substrates. However, the diffusion of some elements in the stainless steel substrate, such as Fe and Cu, will reduce the quality of the battery. Therefore, it is of great significance to find a suitable diffusion barrier material and its low-cost preparation process for improving device efficiency and reducing production cost. [0003] Copper indium gallium selenide (CIGS for short) thin-film solar cells with flexible substrates have broad application prospects in space applications, buil...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/16H01L31/18
CPCY02P70/50
Inventor 孙玉娣张建柱彭博马格林
Owner 任丘市永基光电太阳能有限公司
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