Low-power-consumption polymer thermo-optical switch with air isolating groove structure and manufacturing method of low-power-consumption polymer thermo-optical switch

An air isolation, thermo-optic switch technology, applied in optics, nonlinear optics, instruments, etc., can solve the problems of reduced electrode width and small development space, and achieve the effect of reducing power consumption, low cost, and advantages of power consumption performance parameters

Inactive Publication Date: 2013-09-11
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, it is difficult to reduce the electrode width greatly, so this method has little room for development

Method used

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  • Low-power-consumption polymer thermo-optical switch with air isolating groove structure and manufacturing method of low-power-consumption polymer thermo-optical switch
  • Low-power-consumption polymer thermo-optical switch with air isolating groove structure and manufacturing method of low-power-consumption polymer thermo-optical switch
  • Low-power-consumption polymer thermo-optical switch with air isolating groove structure and manufacturing method of low-power-consumption polymer thermo-optical switch

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Effect test

Embodiment 1

[0050] Example 1. Etching the air isolation groove structure to prepare a low-power polymer thermo-optic switch

[0051] Preparation of core layer (3) material: the preparation process is carried out under sodium yellow light environment. Drop 4.2 grams of SU-82005 into a weighing bottle, then drop 0.8 grams of SU-82005 special diluent into the same weighing bottle, and stopper to prevent volatilization. Stir magnetically for 12 hours to mix SU-82005 and its diluent evenly.

[0052] Preparation of materials for the upper cladding (4): Add 50 grams of methyl methacrylate, 7 grams of glycidyl methacrylate, 0.1 grams of Azobisisobutyronitrile and 150 milliliters of butyl acetate were heated and reacted in a water bath at 75°C for 4 hours, diluted with butyl acetate, filtered through a tetrafluoroethylene membrane with a pore size of 1 micron, and then distilled under reduced pressure to obtain A solution of a copolymer of methyl methacrylate and glycidyl methacrylate (as shown ...

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Abstract

The invention discloses a low-power-consumption polymer thermo-optical switch with an air isolating groove structure and a manufacturing method of the low-power-consumption polymer thermo-optical switch and belongs to the technical field of manufacturing of polymer thermo-optical switches. The low-power-consumption polymer thermo-optical switch is composed of five portions including a substrate (1), a SiO2 lower coating (2), a waveguide core layer (3), a waveguide upper coating (4) and micro heating electrodes (5) from bottom to top, the micro heating electrodes (5) are positioned on a waveguide arm of a waveguide interaction area (103), the waveguide core layer (3) is of a Mach-Zehnder interferometer (MZI) type structure, and the waveguide upper coating (4) of the waveguide interaction area (103) is etched to be of the air isolating groove (9) structure by taking the micro heating electrodes (5) as covering films. Redesigning of structures and sizes of a waveguide and the electrode is avoided, and only a dry etching technology is needed to perform one-step etching operation on a device, in other words, power consumption of the device can be effectively lowered. Power consumption of the manufactured thermo-optical switch can be lowered to 6.5mW and is lowered by 45% than that of the device without adopting the air isolating groove structure.

Description

technical field [0001] The invention belongs to the technical field of polymer thermo-optic switch preparation, and in particular relates to a method for preparing a low-power polymer thermo-optic switch by etching air isolation grooves on both sides of a silicon dioxide / polymer hybrid waveguide by using dry etching technology. Background technique [0002] The optical communication technology using optical fiber as the transmission medium has gradually become an important means to meet the current rapid growth of communication and data transmission. Compared with the traditional communication system, the optical fiber communication system has the advantages of wide frequency bandwidth, large transmission capacity, small transmission loss, low bit error rate and strong anti-electromagnetic interference ability. In particular, the application of wavelength division multiplexing technology (WDM) in optical networks has effectively realized the expansion of optical transmission...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/01
Inventor 孟杰张大明王希斌孙健王菲孙小强
Owner JILIN UNIV
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