Method for synthesizing silicon nitride nano ring by CVD (chemical vapor deposition) method
A technology of silicon nitride and nano rings, which is applied in chemical instruments and methods, nitrogen compounds, nanotechnology, etc., can solve the problems of difficult purification and cumbersome preparation process, and achieve easy-to-obtain, simple preparation process, simple and efficient preparation Effect
Inactive Publication Date: 2013-09-25
河北地质大学
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Abstract
The invention provides a method for synthesizing a silicon nitride nano ring by a CVD (chemical vapor deposition) method. The method comprises the following steps of: evenly mixing silicon powder with silicon dioxide powder according to the molar ratio of 1:1 to obtain mixed powder; putting the mixed powder in a vacuum space; leading nitrogen and ammonia gas as nitridation reaction gases according to the gas flow volume ratio of (1:5) to (5:1), wherein the gas flow of the nitridation reaction gases is 50-200 sccm; heating to 1200-1400 DEG C and carrying out heat preservation for 2-6 hours to prepare the silicon nitride nano ring, and naturally cooling. Compared with the prior art, a catalyst does not need to be added in preparation of the silicon nitride nano ring, so that subsequent purification technology is not needed; and the method is simple in preparation technology, available in required materials, low in cost and applicable to large-scale industrial production. Therefore, the method is a simple and efficient method for preparing the silicon nitride nano ring.
Application Domain
Material nanotechnologyNitrogen compounds
Technology Topic
Silica fumeSilicon nitride +8
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PUM
Property | Measurement | Unit |
Diameter | 4.0 | µm |
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